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EFFECT OF SENSOR CONFIGURATION FOR LOW TEMPERATURE GAS DETECTION WITH SEMICONDUCTING OXIDES

Haidry, Azhar Ali and Ciftyürek, Engin and Saruhan, Bilge (2015) EFFECT OF SENSOR CONFIGURATION FOR LOW TEMPERATURE GAS DETECTION WITH SEMICONDUCTING OXIDES. COST Action TD1105 - New Sensing Technologies for Air-Pollution Control and Environmental Sustainability -, 3.-5.06.2015, Linköping, Schweden.

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Abstract

This work presents the results obtained towards NO2 by using TBE and IDE sensor configurations with the same sensing semiconductor layers. It is known that dopants such as Al3+ or Cr3+ can improves the sensing properties of semiconductor TiO2. Nevertheless, temperatures exceeding 400°C are required for reasonable sensor signal. The use of TBE configuration reduces the operation temperature of these sensors far below 400°C requiring no heater. The schematic of such a TBE electrode system is presented in Fig. 1. The sensors with TBE configuration were fabricated in three steps: firstly, 200 nm thick and 300 μm wide bottom Pt electrodes BE were patterned (via sputtering) on a Al2O3 substrates. The possible sensing mechanism is the matter of discussion in terms of depletion region (LD) and the potential barrier between grains (eVs at grain boundaries).

Item URL in elib:https://elib.dlr.de/98833/
Document Type:Conference or Workshop Item (Speech)
Title:EFFECT OF SENSOR CONFIGURATION FOR LOW TEMPERATURE GAS DETECTION WITH SEMICONDUCTING OXIDES
Authors:
AuthorsInstitution or Email of AuthorsAuthors ORCID iD
Haidry, Azhar AliUNSPECIFIEDUNSPECIFIED
Ciftyürek, EnginUNSPECIFIEDUNSPECIFIED
Saruhan, BilgeUNSPECIFIEDUNSPECIFIED
Date:4 June 2015
Refereed publication:No
Open Access:No
Gold Open Access:No
In SCOPUS:No
In ISI Web of Science:No
Status:Published
Keywords:Electrode configuration, gas sensors, Cr-doped TiO2 coating, sputtering
Event Title:COST Action TD1105 - New Sensing Technologies for Air-Pollution Control and Environmental Sustainability -
Event Location:Linköping, Schweden
Event Type:Workshop
Event Dates:3.-5.06.2015
Organizer:COST Action TD1105
HGF - Research field:Aeronautics, Space and Transport
HGF - Program:Aeronautics
HGF - Program Themes:propulsion systems
DLR - Research area:Aeronautics
DLR - Program:L ER - Engine Research
DLR - Research theme (Project):L - Turbine Technologies
Location: Köln-Porz
Institutes and Institutions:Institute of Materials Research > High Temperature and Functional Coatings
Deposited By: Saruhan-Brings, Dr. Bilge
Deposited On:26 Oct 2015 12:30
Last Modified:10 May 2016 23:33

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