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Analysis of Chip Damage Risk in Thermosonic Wire Bonding

Dresbach, Christian and Lorenz, Georg and Petzold, Matthias and Altenbach, Holm (2011) Analysis of Chip Damage Risk in Thermosonic Wire Bonding. Key Engineering Materials (478), pp. 75-80. Trans Tech Publications. doi: 10.4028/www.scientific.net/KEM.478.75.

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Official URL: http://www.scientific.net


In current highly integrated microelectronic devices including system-in-package and stacked-die solutions, system reliability is strongly influenced by reliability of the gold and copper wire bond interconnections. Especially in state-of-the-art ICs containing mechanically sensitive low- K dielectric materials, controlling the mechanical properties of the free air ball (FAB) is of utmost significance due to chip damage risks during the bond process. Because of an extreme change in microstructure when forming the FAB, the material properties change significantly. Consequently, it is necessary to determine the properties of the FAB itself, when analyzing chip damage risks via finite element simulations. We present a micro-compression test that allows the determination of the hardening behavior of typical gold and copper FABs with diameters between 45 μm and 75 μm. In this test a FAB is placed on a diamond support or a test capillary and loaded by a diamond flat punch in a microindenter. The hardening was determined from force/displacement behavior via parameter identification using finite element simulations. The identified yield stresses correlate very well with the microstructure which was determined by electron backscatter diffraction method; this means that the yield stress decreases with increasing mean grain diameter in analogy to the Hall- Petch correlation. Compared to unprocessed wires the initial yield stresses are 50% to 60% lower. Considering these material properties, the damage risk during bonding on complex bond pad layouts can be predicted more realistically. This can be shown by results of real bond structures.

Item URL in elib:https://elib.dlr.de/69689/
Document Type:Article
Title:Analysis of Chip Damage Risk in Thermosonic Wire Bonding
AuthorsInstitution or Email of AuthorsAuthor's ORCID iD
Dresbach, Christianchristian.dresbach (at) dlr.deUNSPECIFIED
Lorenz, Georggeorg.lorenz (at) iwmh.fhg.deUNSPECIFIED
Petzold, Matthiasmatthias.petzold (at) iwmh.fhg.deUNSPECIFIED
Altenbach, Holmholm.altenbach (at) iw.uni-halle.deUNSPECIFIED
Date:19 April 2011
Journal or Publication Title:Key Engineering Materials
Refereed publication:Yes
Open Access:No
Gold Open Access:No
In ISI Web of Science:No
DOI :10.4028/www.scientific.net/KEM.478.75
Page Range:pp. 75-80
EditorsEmailEditor's ORCID iD
Öchsner, Andreasandreas.oechsner@gmail.comUNSPECIFIED
da Silva, Lucas F.M.lucas@fe.up.ptUNSPECIFIED
Altenbach, Holmholm.altenbach@iw.uni-halle.deUNSPECIFIED
Publisher:Trans Tech Publications
Series Name:Advanced Computational Engineering and Experimenting
Keywords:wire bonding, gold, copper, free air ball, micro-compression test
HGF - Research field:Aeronautics, Space and Transport
HGF - Program:Transport
HGF - Program Themes:V UR - Schonung von Umwelt und Ressourcen (old)
DLR - Research area:Transport
DLR - Program:V UR - Schonung von Umwelt und Ressourcen
DLR - Research theme (Project):V - Konzeption von Bauweisen mit fortschrittlicher Integration von Teilen und Funktionen (old)
Location: Köln-Porz
Institutes and Institutions:Institute of Materials Research > Metallic Structures and Hybrid Material Systems
Deposited By: Dresbach, Dr. Christian
Deposited On:02 May 2011 11:26
Last Modified:06 Sep 2019 15:22

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