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Gas Flow Sputtering – An approach to coat complex geometries and Non Line of Sight areas

Tang, Stanley and Schulz, Uwe (2009) Gas Flow Sputtering – An approach to coat complex geometries and Non Line of Sight areas. 36th International Conference on Metallurgical Coatings & Thin Films (ICMCTF) 2009, 27.Apr. - 01.Mai. 2009, San Diego.

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Most PVD techniques are limited in coating complex geometries such as turbine blades without additional substrate manipulation. A novel approach to overcome these limits is the innovative Gas Flow Sputtering. This technique combines a hollow cathode glow discharge with an argon gas flow that supports transportation of sputtered material to the substrate. The mixture of gas and sputtered material flows around the contour of the geometry and reaches Non Line of Sight areas. In this investigation different complex geometries such as u-shaped profiles and pipes were coated with pure titanium. The influence of the angle between gas flow direction and substrate surface (incident angle) on coating thickness distribution, microstructure and crystal orientation was examined by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The results show that a stripe or a pipe placed parallel to the gas flow direction is coated over the whole length. The pipes are coated outside as well as inside. The circumference of a cylinder positioned perpendicular to the gas flow direction is completely covered with material. In all cases the coating thickness varies over the surface, which is caused by the interplay between convection and out-diffusion as the main deposition mechanisms.

Item URL in elib:https://elib.dlr.de/60972/
Document Type:Conference or Workshop Item (Speech)
Title:Gas Flow Sputtering – An approach to coat complex geometries and Non Line of Sight areas
AuthorsInstitution or Email of AuthorsAuthor's ORCID iD
Date:April 2009
Open Access:No
Gold Open Access:No
In ISI Web of Science:No
Keywords:Gas flow sputtering, GFS, Non Line of Sight, PVD, Titanium
Event Title:36th International Conference on Metallurgical Coatings & Thin Films (ICMCTF) 2009
Event Location:San Diego
Event Type:international Conference
Event Dates:27.Apr. - 01.Mai. 2009
Organizer:Advanced Surface Engineering Devision
HGF - Research field:Aeronautics, Space and Transport (old)
HGF - Program:Aeronautics
HGF - Program Themes:Propulsion Systems (old)
DLR - Research area:Aeronautics
DLR - Program:L ER - Engine Research
DLR - Research theme (Project):L - Turbine Technologies (old)
Location: Köln-Porz
Institutes and Institutions:Institute of Materials Research > High Temperature and Functional Coatings
Deposited By: Tang, Stanley
Deposited On:23 Nov 2009 12:07
Last Modified:23 Nov 2009 12:07

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