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Do, H. T. and Thieme, G. and Fröhlich, M. and Kersten, H. and Hippler, R. (2005) Ion Molecule and Dust Particle Formation in Ar/CH<sub>4</sub>, Ar/C<sub>2</sub>H<sub>2</sub> and Ar/C<sub>3</sub>H<sub>6</sub> radio-frequency plasmas. Contributed Plasma Physics, 45 (No. 5-6), pp. 378-384. WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. doi: 10.1002/ctpp.200510041.
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Abstract
Molecule and particle formation in a capacitively coupled radio-frequency discharge has been investigated by means of plasma process monitoring employing energy-dispersive mass spectrometry. Particle growth has been studied by recording the intensity of the transmitted and scattered laser signal from the particle cloud. An oscillation of the transmitted laser intensity was observed which is caused by periodic formation and expansion of acentral void. This behaviour can be explained by multi-generation dust cloud formation.
| Item URL in elib: | https://elib.dlr.de/20327/ | ||||||||||||||||||||||||
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| Document Type: | Article | ||||||||||||||||||||||||
| Title: | Ion Molecule and Dust Particle Formation in Ar/CH<sub>4</sub>, Ar/C<sub>2</sub>H<sub>2</sub> and Ar/C<sub>3</sub>H<sub>6</sub> radio-frequency plasmas | ||||||||||||||||||||||||
| Authors: |
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| Date: | 29 July 2005 | ||||||||||||||||||||||||
| Journal or Publication Title: | Contributed Plasma Physics | ||||||||||||||||||||||||
| Refereed publication: | Yes | ||||||||||||||||||||||||
| Open Access: | No | ||||||||||||||||||||||||
| Gold Open Access: | No | ||||||||||||||||||||||||
| In SCOPUS: | No | ||||||||||||||||||||||||
| In ISI Web of Science: | Yes | ||||||||||||||||||||||||
| Volume: | 45 | ||||||||||||||||||||||||
| DOI: | 10.1002/ctpp.200510041 | ||||||||||||||||||||||||
| Page Range: | pp. 378-384 | ||||||||||||||||||||||||
| Publisher: | WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim | ||||||||||||||||||||||||
| Status: | Published | ||||||||||||||||||||||||
| Keywords: | dust particles, plasma, molecular ions | ||||||||||||||||||||||||
| HGF - Research field: | Aeronautics, Space and Transport (old) | ||||||||||||||||||||||||
| HGF - Program: | Aeronautics | ||||||||||||||||||||||||
| HGF - Program Themes: | Propulsion Systems (old) | ||||||||||||||||||||||||
| DLR - Research area: | Aeronautics | ||||||||||||||||||||||||
| DLR - Program: | L ER - Engine Research | ||||||||||||||||||||||||
| DLR - Research theme (Project): | L - Turbine Technologies (old) | ||||||||||||||||||||||||
| Location: | Köln-Porz | ||||||||||||||||||||||||
| Institutes and Institutions: | Institute of Materials Research > High Temperature and Functional Coatings | ||||||||||||||||||||||||
| Deposited By: | Fröhlich, Maik | ||||||||||||||||||||||||
| Deposited On: | 04 Sep 2007 | ||||||||||||||||||||||||
| Last Modified: | 27 Apr 2009 04:46 |
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