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Complex (dusty) plasmas: Examples for applications and observation of magnetron-induced phenomena

Kersten, H. and Thieme, G. and Fröhlich, M. and Bojic, D. and Tung, D.H. and Quaas, M. and Wulff, H. and Hippler, R. (2005) Complex (dusty) plasmas: Examples for applications and observation of magnetron-induced phenomena. Pure and Applied Chemistry, Vol. 77 (Issue 2), pp. 415-428. DOI: 10.1351/pac200577020415

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Abstract

Low-pressure plasmas offer a unique possibility of confinement, control, and fine tailoring of particle properties. Hence, dusty plasmas have grown into a vast field, and new applications of plasma-processed dust particles are emerging. During the deposition of thin amorphous films onto melamine formaldehyde (MF) microparticles in a C<sub>2</sub>H<sub>2</sub> plasma, the generation of nanosized carbon particles was also studied. The size distribution of those particles is quite uniform. In another experiment, the stability of luminophore grains could be improved by coating with protective Al<sub>2</sub>O<sub>3</sub> films that are deposited by a plasma-enhanced chemical vapor deposition (PECVD) process using a metal-organic precursor gas. Coating of SiO<sub>2</sub> microparticles with thin metal layers by magnetron sputtering is also described. Especially the interaction of the microsized grains confined in a radio frequency (rf) plasma with the dc magnetron discharge during deposition was investigated. The observations emphasize that the interaction between magnetron plasma and injected microdisperse powder particles can also be used as a diagnostic tool for the characterization of magnetron sputter sources.

Item URL in elib:https://elib.dlr.de/20314/
Document Type:Article
Title:Complex (dusty) plasmas: Examples for applications and observation of magnetron-induced phenomena
Authors:
AuthorsInstitution or Email of AuthorsAuthors ORCID iD
Kersten, H.Institute for Nonthermal Plasmaphysics (INP), F.-L.-Jahn-Straße 19, D-17489 GreifswaldUNSPECIFIED
Thieme, G.Institute for Physics, University of Greifswald, Domstraße 10a, D-17487 GreifswaldUNSPECIFIED
Fröhlich, M.UNSPECIFIEDUNSPECIFIED
Bojic, D.Institute for Physics, University of Greifswald, Domstraße 10a, D-17487 GreifswaldUNSPECIFIED
Tung, D.H.Institute for Physics, University of Greifswald, Domstraße 10a, D-17487 GreifswaldUNSPECIFIED
Quaas, M.Institute of Chemistry and Biochemistry, University of Greifswald, Soldmannstraße 16/17, D-17487 GreifswaldUNSPECIFIED
Wulff, H.Institute of Chemistry and Biochemistry, University of Greifswald, Soldmannstraße 16/17, D-17487 GreifswaldUNSPECIFIED
Hippler, R.Institute for Physics, University of Greifswald, Domstraße 10a, D-17487 GreifswaldUNSPECIFIED
Date:15 February 2005
Journal or Publication Title:Pure and Applied Chemistry
Refereed publication:Yes
Open Access:No
Gold Open Access:No
In SCOPUS:No
In ISI Web of Science:Yes
Volume:Vol. 77
DOI :10.1351/pac200577020415
Page Range:pp. 415-428
Status:Published
Keywords:dusty plasma, plasma-particle interaction, magnetron sputtering, plasma diagnostics, luminescent particles, thin film deposition
HGF - Research field:Aeronautics, Space and Transport (old)
HGF - Program:Aeronautics
HGF - Program Themes:Propulsion Systems (old)
DLR - Research area:Aeronautics
DLR - Program:L ER - Engine Research
DLR - Research theme (Project):L - Turbine Technologies (old)
Location: Köln-Porz
Institutes and Institutions:Institute of Materials Research > High Temperature and Functional Coatings
Deposited By: Fröhlich, Maik
Deposited On:04 Sep 2007
Last Modified:27 Apr 2009 04:45

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