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Kersten, H. und Thieme, G. und Fröhlich, M. und Bojic, D. und Tung, D.H. und Quaas, M. und Wulff, H. und Hippler, R. (2005) Complex (dusty) plasmas: Examples for applications and observation of magnetron-induced phenomena. Pure and Applied Chemistry, Vol. 77 (Issue 2), Seiten 415-428. doi: 10.1351/pac200577020415.
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Kurzfassung
Low-pressure plasmas offer a unique possibility of confinement, control, and fine tailoring of particle properties. Hence, dusty plasmas have grown into a vast field, and new applications of plasma-processed dust particles are emerging. During the deposition of thin amorphous films onto melamine formaldehyde (MF) microparticles in a C<sub>2</sub>H<sub>2</sub> plasma, the generation of nanosized carbon particles was also studied. The size distribution of those particles is quite uniform. In another experiment, the stability of luminophore grains could be improved by coating with protective Al<sub>2</sub>O<sub>3</sub> films that are deposited by a plasma-enhanced chemical vapor deposition (PECVD) process using a metal-organic precursor gas. Coating of SiO<sub>2</sub> microparticles with thin metal layers by magnetron sputtering is also described. Especially the interaction of the microsized grains confined in a radio frequency (rf) plasma with the dc magnetron discharge during deposition was investigated. The observations emphasize that the interaction between magnetron plasma and injected microdisperse powder particles can also be used as a diagnostic tool for the characterization of magnetron sputter sources.
| elib-URL des Eintrags: | https://elib.dlr.de/20314/ | ||||||||||||||||||||||||||||||||||||
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| Dokumentart: | Zeitschriftenbeitrag | ||||||||||||||||||||||||||||||||||||
| Titel: | Complex (dusty) plasmas: Examples for applications and observation of magnetron-induced phenomena | ||||||||||||||||||||||||||||||||||||
| Autoren: |
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| Datum: | 15 Februar 2005 | ||||||||||||||||||||||||||||||||||||
| Erschienen in: | Pure and Applied Chemistry | ||||||||||||||||||||||||||||||||||||
| Referierte Publikation: | Ja | ||||||||||||||||||||||||||||||||||||
| Open Access: | Nein | ||||||||||||||||||||||||||||||||||||
| Gold Open Access: | Nein | ||||||||||||||||||||||||||||||||||||
| In SCOPUS: | Nein | ||||||||||||||||||||||||||||||||||||
| In ISI Web of Science: | Ja | ||||||||||||||||||||||||||||||||||||
| Band: | Vol. 77 | ||||||||||||||||||||||||||||||||||||
| DOI: | 10.1351/pac200577020415 | ||||||||||||||||||||||||||||||||||||
| Seitenbereich: | Seiten 415-428 | ||||||||||||||||||||||||||||||||||||
| Status: | veröffentlicht | ||||||||||||||||||||||||||||||||||||
| Stichwörter: | dusty plasma, plasma-particle interaction, magnetron sputtering, plasma diagnostics, luminescent particles, thin film deposition | ||||||||||||||||||||||||||||||||||||
| HGF - Forschungsbereich: | Verkehr und Weltraum (alt) | ||||||||||||||||||||||||||||||||||||
| HGF - Programm: | Luftfahrt | ||||||||||||||||||||||||||||||||||||
| HGF - Programmthema: | Antriebe (alt) | ||||||||||||||||||||||||||||||||||||
| DLR - Schwerpunkt: | Luftfahrt | ||||||||||||||||||||||||||||||||||||
| DLR - Forschungsgebiet: | L ER - Antriebsforschung | ||||||||||||||||||||||||||||||||||||
| DLR - Teilgebiet (Projekt, Vorhaben): | L - Turbinentechnologien (alt) | ||||||||||||||||||||||||||||||||||||
| Standort: | Köln-Porz | ||||||||||||||||||||||||||||||||||||
| Institute & Einrichtungen: | Institut für Werkstoff-Forschung > Hochtemperatur-und Funktionsschutzschichten | ||||||||||||||||||||||||||||||||||||
| Hinterlegt von: | Fröhlich, Maik | ||||||||||||||||||||||||||||||||||||
| Hinterlegt am: | 04 Sep 2007 | ||||||||||||||||||||||||||||||||||||
| Letzte Änderung: | 27 Apr 2009 04:45 |
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