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Prozessieren von Halbleitern in TEMPUS/EML

Lohöfer, G. (2005) Prozessieren von Halbleitern in TEMPUS/EML. Project Report, DLR-Interner Bericht. 333-05/1. 65 S.

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Item URL in elib:https://elib.dlr.de/18905/
Document Type:Monograph (Project Report, DLR-Interner Bericht)
Additional Information: LIDO-Berichtsjahr=2005,
Title:Prozessieren von Halbleitern in TEMPUS/EML
Authors:
AuthorsInstitution or Email of AuthorsAuthor's ORCID iDORCID Put Code
Lohöfer, G.UNSPECIFIEDUNSPECIFIEDUNSPECIFIED
Date:2005
Open Access:No
Number of Pages:65
Status:Published
Keywords:elektromagnetische Levitation (EML), TEMPUS, Halbleiter
HGF - Research field:Aeronautics, Space and Transport (old)
HGF - Program:Space (old)
HGF - Program Themes:W FR - Forschung unter Weltraumbedingungen (old)
DLR - Research area:Space
DLR - Program:W FR - Forschung unter Weltraumbedingungen
DLR - Research theme (Project):UNSPECIFIED
Location: Köln-Porz
Institutes and Institutions:Institute of Materials Physics in Space > Institute of Space Simulation
Deposited By: Herrmann, Astrid
Deposited On:09 Oct 2005
Last Modified:14 Jan 2010 12:46

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