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Photoelectron spectra of finite-thickness layers

Afanas'ev, Viktor P. and Golovina, Olga Y. and Gryazev, Alexander S. and Efremenko, Dmitry and Kaplya, Pavel S. (2015) Photoelectron spectra of finite-thickness layers. Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 33 (3), 03D101-1-03D101-6. American Institute of Physics (AIP). DOI: 10.1116/1.4907228 ISSN 2166-2746

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Official URL: http://dx.doi.org/10.1116/1.4907228

Abstract

A method of computing x-ray photoemission spectra in the wide range of energy losses and different sighting angles is presented. Photoemission spectra for layers of finite thickness are investigated. Angular and energy spectra are analyzed using the invariant imbedding principle. They are computed using small-angle approximation and the exact numerical solution of the multiple photoelectron scattering events in solids. The presented methods of x-ray photoemission spectra analysis are compared regarding their efficiencies. Comparison of the exact numerical solution to those based on straight line approximation and small-angle approximation reveals an error in straight line approximation of about 50%. Numerical solutions are compared with the experimental data and Monte-Carlo simulations.

Item URL in elib:https://elib.dlr.de/103385/
Document Type:Article
Title:Photoelectron spectra of finite-thickness layers
Authors:
AuthorsInstitution or Email of AuthorsAuthors ORCID iD
Afanas'ev, Viktor P.National Research University "Moscow Power Engineering Institute", RussiaUNSPECIFIED
Golovina, Olga Y.National Research University "Moscow Power Engineering Institute", RussiaUNSPECIFIED
Gryazev, Alexander S.National Research University "Moscow Power Engineering Institute", RussiaUNSPECIFIED
Efremenko, Dmitrydmitry.efremenko (at) dlr.deUNSPECIFIED
Kaplya, Pavel S.National Research University "Moscow Power Engineering Institute", RussiaUNSPECIFIED
Date:18 February 2015
Journal or Publication Title:Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Refereed publication:Yes
Open Access:Yes
Gold Open Access:No
In SCOPUS:Yes
In ISI Web of Science:Yes
Volume:33
DOI :10.1116/1.4907228
Page Range:03D101-1-03D101-6
Editors:
EditorsEmail
Aydil, ErayUniversity of Minnesota, USA
Publisher:American Institute of Physics (AIP)
ISSN:2166-2746
Status:Published
Keywords:photo-electron spectra; XPS; electron spectroscopy; transport theory
HGF - Research field:Aeronautics, Space and Transport
HGF - Program:Space
HGF - Program Themes:Earth Observation
DLR - Research area:Raumfahrt
DLR - Program:R EO - Erdbeobachtung
DLR - Research theme (Project):R - Vorhaben Spektrometrische Verfahren und Konzepte der Fernerkundung (old)
Location: Oberpfaffenhofen
Institutes and Institutions:Remote Sensing Technology Institute > Atmospheric Processors
Deposited By: Efremenko, Dr Dmitry
Deposited On:11 Mar 2016 12:08
Last Modified:31 Jul 2019 20:00

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