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Ultra-thin TaN Films for Superconducting Nanowire Single-Photon Detectors

Ilin, Konstantin and Hofherr, Mathias and Rall, Dagmar and Siegel, Michael and Semenov, Alexej and Engel, Andreas and Inderbitzin, Kevin and Aeschbacher, A and Schilling, Andreas (2012) Ultra-thin TaN Films for Superconducting Nanowire Single-Photon Detectors. Journal of Low Temperature Physics, 167, pp. 809-814. Springer. doi: 10.1007/s10909-011-0424-3.

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Abstract

Ultra-thin films of superconducting tantalum nitride are deposited by reactive magnetron sputtering on heated sapphire substrates. The critical temperature TC = 10.25 K is reached for films thicker than 10 nm. A superconducting nanowire single-photon detector in the form of a meander line with a width of 110 nm was made from 5 nm thick TaN film. The detector had a transition temperature of 8.3 K and a critical current density of 4 MA/cm^2 at 4.2 K. A photon detection efficiency of 20% has been obtained for the detector with a filling factor of 0.55 at wavelengths up to 700 nm.

Item URL in elib:https://elib.dlr.de/73482/
Document Type:Article
Title:Ultra-thin TaN Films for Superconducting Nanowire Single-Photon Detectors
Authors:
AuthorsInstitution or Email of AuthorsAuthor's ORCID iDORCID Put Code
Ilin, KonstantinUniversity of KarlsruheUNSPECIFIEDUNSPECIFIED
Hofherr, MathiasInstitut für Mikro- und Nanoelektronische Systeme (IMS), Karlsruher Institut für Technolgie (KIT), HertzstraßeUNSPECIFIEDUNSPECIFIED
Rall, DagmarKITUNSPECIFIEDUNSPECIFIED
Siegel, MichaelUniversität KarlsruheUNSPECIFIEDUNSPECIFIED
Semenov, AlexejUNSPECIFIEDUNSPECIFIEDUNSPECIFIED
Engel, AndreasUniversity of ZürichUNSPECIFIEDUNSPECIFIED
Inderbitzin, KevinUniversity of ZürichUNSPECIFIEDUNSPECIFIED
Aeschbacher, AUniversity of ZürichUNSPECIFIEDUNSPECIFIED
Schilling, AndreasUniversity of ZürichUNSPECIFIEDUNSPECIFIED
Date:2012
Journal or Publication Title:Journal of Low Temperature Physics
Refereed publication:Yes
Open Access:No
Gold Open Access:No
In SCOPUS:Yes
In ISI Web of Science:Yes
Volume:167
DOI:10.1007/s10909-011-0424-3
Page Range:pp. 809-814
Publisher:Springer
Status:Published
Keywords:TaN · Superconducting thin films · Superconducting detectors
HGF - Research field:Aeronautics, Space and Transport
HGF - Program:Space
HGF - Program Themes:Earth Observation
DLR - Research area:Raumfahrt
DLR - Program:R EO - Earth Observation
DLR - Research theme (Project):R - Vorhaben IR-Sensorik, IR-Missionsprojekte (old)
Location: Berlin-Adlershof
Institutes and Institutions:Institute of Planetary Research > Experimentelle Planetenphysik
Deposited By: Semenov, Prof.Dr. Alexey
Deposited On:11 Dec 2012 14:36
Last Modified:22 Jun 2023 10:01

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