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Ultra-thin TaN Films for Superconducting Nanowire Single-Photon Detectors

Ilin, Konstantin and Hofherr, Mathias and Rall, Dagmar and Siegel, Michael and Semenov, Alexej and Engel, Andreas and Inderbitzin, Kevin and Aeschbacher, A and Schilling, Andreas (2012) Ultra-thin TaN Films for Superconducting Nanowire Single-Photon Detectors. Journal of Low Temperature Physics, 167, pp. 809-814. Springer. DOI: DOI 10.1007/s10909-011-0424-3

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Ultra-thin films of superconducting tantalum nitride are deposited by reactive magnetron sputtering on heated sapphire substrates. The critical temperature TC = 10.25 K is reached for films thicker than 10 nm. A superconducting nanowire single-photon detector in the form of a meander line with a width of 110 nm was made from 5 nm thick TaN film. The detector had a transition temperature of 8.3 K and a critical current density of 4 MA/cm^2 at 4.2 K. A photon detection efficiency of 20% has been obtained for the detector with a filling factor of 0.55 at wavelengths up to 700 nm.

Item URL in elib:https://elib.dlr.de/73482/
Document Type:Article
Title:Ultra-thin TaN Films for Superconducting Nanowire Single-Photon Detectors
AuthorsInstitution or Email of AuthorsAuthors ORCID iD
Ilin, KonstantinUniversity of KarlsruheUNSPECIFIED
Hofherr, MathiasInstitut für Mikro- und Nanoelektronische Systeme (IMS), Karlsruher Institut für Technolgie (KIT), HertzstraßeUNSPECIFIED
Siegel, MichaelUniversität KarlsruheUNSPECIFIED
Semenov, Alexejalexei.semenov (at) dlr.deUNSPECIFIED
Engel, AndreasUniversity of ZürichUNSPECIFIED
Inderbitzin, KevinUniversity of ZürichUNSPECIFIED
Aeschbacher, AUniversity of ZürichUNSPECIFIED
Schilling, AndreasUniversity of ZürichUNSPECIFIED
Journal or Publication Title:Journal of Low Temperature Physics
Refereed publication:Yes
Open Access:No
Gold Open Access:No
In ISI Web of Science:Yes
DOI :DOI 10.1007/s10909-011-0424-3
Page Range:pp. 809-814
Keywords:TaN · Superconducting thin films · Superconducting detectors
HGF - Research field:Aeronautics, Space and Transport
HGF - Program:Space
HGF - Program Themes:Earth Observation
DLR - Research area:Raumfahrt
DLR - Program:R EO - Erdbeobachtung
DLR - Research theme (Project):R - Vorhaben IR-Sensorik, IR-Missionsprojekte
Location: Berlin-Adlershof
Institutes and Institutions:Institute of Planetary Research > Experimentelle Planetenphysik
Deposited By: Semenov, Prof.Dr. Alexey
Deposited On:11 Dec 2012 14:36
Last Modified:04 Apr 2013 16:34

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