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Technology and Performance of THz Hot-Electron Bolometer Mixers

Ilin, Konstantin and Stockhausen, Axel and Scheuring, A and Siegel, Michael and Semenov, Alexej and Richter, Heiko and Hübers, H.-W. (2009) Technology and Performance of THz Hot-Electron Bolometer Mixers. IEEE Transactions on Applied Superconductivity, 19 (3-1), pp. 269-273. IEEE - Institute of Electrical and Electronics Engineers.

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Official URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5153030&isnumber=5166641

Abstract

Hot-Electron Bolometer (HEB) mixers are a complex multi-layer thin film structure containing an ultra-thin superconducting film of NbN as a detecting element and a thick normal metal layer as an antenna structure. We have optimized the fabrication process starting with ultra-thin NbN films, Au films for antenna structures and their patterning using e-beam lithography and lift-off. The coupling between normal conducting antenna and NbN detector has been improved by introducing an intermediate NbN film to reduce proximity suppression of superconductivity in the detecting element. A critical temperature of about 9.5 K is reached for NbN films with a thickness between 5 nm and 6 nm. A twofold increase of the film thickness increases the critical temperature to 12 K.We have shown that a 20 nm thick buffer layer of NbN under a much thicker Au layer is sufficient to ensure a critical temperature of the bi-layer of 9 K. This value is close to the critical temperature of 5.5 nm thick HEB devices. The noise temperature of HEB mixer made using improved technology is about 800 K and was measured in a liquid cryogen free system with a quantum cascade laser as 2.5 THz local oscillator.

Item URL in elib:https://elib.dlr.de/60350/
Document Type:Article
Title:Technology and Performance of THz Hot-Electron Bolometer Mixers
Authors:
AuthorsInstitution or Email of AuthorsAuthors ORCID iD
Ilin, KonstantinUniversity of KarlsruheUNSPECIFIED
Stockhausen, AxelUniversität KarlsruheUNSPECIFIED
Scheuring, AUniversität KarlsruheUNSPECIFIED
Siegel, MichaelUniversität KarlsruheUNSPECIFIED
Semenov, AlexejUNSPECIFIEDUNSPECIFIED
Richter, HeikoUNSPECIFIEDUNSPECIFIED
Hübers, H.-W.UNSPECIFIEDUNSPECIFIED
Date:June 2009
Journal or Publication Title:IEEE Transactions on Applied Superconductivity
Refereed publication:Yes
Open Access:No
Gold Open Access:No
In SCOPUS:Yes
In ISI Web of Science:Yes
Volume:19
Page Range:pp. 269-273
Publisher:IEEE - Institute of Electrical and Electronics Engineers
Status:Published
Keywords:Niobium nitride, proximity effect, superconducting hot-electron bolometer detector, THz mixer
HGF - Research field:Aeronautics, Space and Transport
HGF - Program:Transport
HGF - Program Themes:Traffic Management (old)
DLR - Research area:Transport
DLR - Program:V VM - Verkehrsmanagement
DLR - Research theme (Project):V - FAMOUS (old)
Location: Berlin-Adlershof
Institutes and Institutions:Institute of Planetary Research
Deposited By: Semenov, Prof.Dr. Alexey
Deposited On:02 Nov 2009 14:00
Last Modified:06 Sep 2019 15:18

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