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Ultra-thin NbN films on Si: crystalline and superconducting properties

Ilin, Konstantin and Schneider, R and Gerthsen, D and Engel, Andreas and Bartolf, Holger and Schilling, Andreas and Semenov, Alexei and Hübers, Heinz-Wilhelm and Freitag, B and Siegel, Michael (2008) Ultra-thin NbN films on Si: crystalline and superconducting properties. In: Journal of Physics: Conference Series, 97. IOP Publishing. 8th European Conference on Applied Superconductivity (EUCAS 2007), 2007-09-16 - 2007-09-20, Brussels (Belgium).

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Official URL: http://www.iop.org/EJ/article/1742-6596/97/1/012045/jpconf8_97_012045.pdf?request-id=d459f6f4-6a79-4bbc-bd18-c35ca482111a


We present results on superconducting and crystalline properties of NbN films with a thickness smaller than 10 nm. The films were deposited using reactive magnetron sputtering on heated silicon substrates. Zero resistance critical temperatures of about 9 K have been measured for films with a thickness of about 5 nm and reaches values ≈12 K for 10 nm thick films. A value of the superconducting coherence length of about 4 nm was estimated from the measurements of the second critical magnetic field. High-resolution transmission electron microscopy accompanied with electron-spectroscopy techniques was used to analyze the structure, thickness, and film-substrate interface of fabricated films. The interrelations between fabrication conditions, superconducting and crystalline properties of NbN films on Si substrates are presented and discussed.

Item URL in elib:https://elib.dlr.de/56542/
Document Type:Conference or Workshop Item (UNSPECIFIED)
Additional Information:doi:10.1088/1742-6596/97/1/012045
Title:Ultra-thin NbN films on Si: crystalline and superconducting properties
AuthorsInstitution or Email of AuthorsAuthor's ORCID iD
Ilin, KonstantinUniversity of KarlsruheUNSPECIFIED
Schneider, RUniversity of KarlsruheUNSPECIFIED
Gerthsen, DUniversity of KarlsruheUNSPECIFIED
Engel, AndreasUniversity of ZürichUNSPECIFIED
Bartolf, HolgerUniversity of ZürichUNSPECIFIED
Schilling, AndreasUniversity of ZürichUNSPECIFIED
Freitag, BFEI Company BV, Eindhoven, The NetherlandsUNSPECIFIED
Siegel, MichaelUniversity of KarlsruheUNSPECIFIED
Date:March 2008
Journal or Publication Title:Journal of Physics: Conference Series
Refereed publication:No
Open Access:No
Gold Open Access:No
In ISI Web of Science:No
Number of Pages:6
Publisher:IOP Publishing
Keywords:ultra-thin films, superconductivity
Event Title:8th European Conference on Applied Superconductivity (EUCAS 2007)
Event Location:Brussels (Belgium)
Event Type:international Conference
Event Dates:2007-09-16 - 2007-09-20
HGF - Research field:Aeronautics, Space and Transport (old)
HGF - Program:Space (old)
HGF - Program Themes:W EW - Erforschung des Weltraums
DLR - Research area:Space
DLR - Program:W EW - Erforschung des Weltraums
DLR - Research theme (Project):W - Vorhaben IR-Astronomie (old)
Location: Berlin-Adlershof
Institutes and Institutions:Institute of Planetary Research > Terahertz and Infrared Sensors
Deposited By: Semenov, Prof.Dr. Alexey
Deposited On:05 Jan 2009
Last Modified:17 Mar 2010 11:41

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