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Entwicklung und Optimierung von gesputterten Oxinitridschichten aus dem System Ti-Al-O-N.

Weigand, P. (1995) Entwicklung und Optimierung von gesputterten Oxinitridschichten aus dem System Ti-Al-O-N. Other. RWTH Aachen, Institut für Metallkunde und Metallphysik.. 108 S.

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Item URL in elib:https://elib.dlr.de/43008/
Document Type:Monograph (Other)
Additional Information: LIDO-Berichtsjahr=1995,
Title:Entwicklung und Optimierung von gesputterten Oxinitridschichten aus dem System Ti-Al-O-N.
Authors:
AuthorsInstitution or Email of AuthorsAuthor's ORCID iDORCID Put Code
Weigand, P.UNSPECIFIEDUNSPECIFIEDUNSPECIFIED
Date:1995
Journal or Publication Title:RWTH Aachen, Institut für Metallkunde und Metallphysik.
Open Access:No
Number of Pages:108
Status:Published
HGF - Research field:UNSPECIFIED
HGF - Program:Aeronautics
HGF - Program Themes:other
DLR - Research area:UNSPECIFIED
DLR - Program:L TT - Triebwerkstechnologien
DLR - Research theme (Project):UNSPECIFIED
Location: Köln-Porz
Institutes and Institutions:Institute of Materials Research
Deposited By: DLR-Beauftragter, elib
Deposited On:02 Apr 2006
Last Modified:27 Apr 2009 12:35

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