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TPCVD of Si-[X-]C-N from Liquid Organometallic Precursors

Bouyer, E. and Müller, M. and Schiller, G. (2003) TPCVD of Si-[X-]C-N from Liquid Organometallic Precursors. 16th Int. Symposium on Plasma Chemistry, Taormina, Italien, Juni 2003.

Full text not available from this repository.

Official URL: matthias.mueller@dlr.de


Item URL in elib:https://elib.dlr.de/2659/
Document Type:Conference or Workshop Item (Paper)
Additional Information: LIDO-Berichtsjahr=2003,
Title:TPCVD of Si-[X-]C-N from Liquid Organometallic Precursors
Authors:
AuthorsInstitution or Email of AuthorsAuthors ORCID iD
Bouyer, E.UNSPECIFIEDUNSPECIFIED
Müller, M.UNSPECIFIEDUNSPECIFIED
Schiller, G.UNSPECIFIEDUNSPECIFIED
Date:2003
Open Access:No
Gold Open Access:No
In SCOPUS:No
In ISI Web of Science:No
Status:Published
Keywords:TPCVD, liquid precursor, rf plasma
Event Title:16th Int. Symposium on Plasma Chemistry, Taormina, Italien, Juni 2003
HGF - Research field:Energy
HGF - Program:Efficient Energy Conversion (old)
HGF - Program Themes:E BZ - Fuel cells (old)
DLR - Research area:Energy
DLR - Program:E BZ - Fuel cells
DLR - Research theme (Project):UNSPECIFIED
Location: Stuttgart
Institutes and Institutions:Institute of Engineering Thermodynamics
Deposited By: DLR-Beauftragter, elib
Deposited On:16 Sep 2005
Last Modified:06 Jan 2010 15:25

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