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Bouyer, E. and Müller, M. and Schiller, G. (2003) TPCVD of Si-[X-]C-N from Liquid Organometallic Precursors. 16th Int. Symposium on Plasma Chemistry, Taormina, Italien, Juni 2003.
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Official URL: matthias.mueller@dlr.de
| Item URL in elib: | https://elib.dlr.de/2659/ | ||||||||||||||||
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| Document Type: | Conference or Workshop Item (Paper) | ||||||||||||||||
| Additional Information: | LIDO-Berichtsjahr=2003, | ||||||||||||||||
| Title: | TPCVD of Si-[X-]C-N from Liquid Organometallic Precursors | ||||||||||||||||
| Authors: |
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| Date: | 2003 | ||||||||||||||||
| Open Access: | No | ||||||||||||||||
| Gold Open Access: | No | ||||||||||||||||
| In SCOPUS: | No | ||||||||||||||||
| In ISI Web of Science: | No | ||||||||||||||||
| Status: | Published | ||||||||||||||||
| Keywords: | TPCVD, liquid precursor, rf plasma | ||||||||||||||||
| Event Title: | 16th Int. Symposium on Plasma Chemistry, Taormina, Italien, Juni 2003 | ||||||||||||||||
| HGF - Research field: | Energy | ||||||||||||||||
| HGF - Program: | Efficient Energy Conversion (old) | ||||||||||||||||
| HGF - Program Themes: | E BZ - Fuel cells (old) | ||||||||||||||||
| DLR - Research area: | Energy | ||||||||||||||||
| DLR - Program: | E BZ - Fuel cells | ||||||||||||||||
| DLR - Research theme (Project): | UNSPECIFIED | ||||||||||||||||
| Location: | Stuttgart | ||||||||||||||||
| Institutes and Institutions: | Institute of Engineering Thermodynamics | ||||||||||||||||
| Deposited By: | DLR-Beauftragter, elib | ||||||||||||||||
| Deposited On: | 16 Sep 2005 | ||||||||||||||||
| Last Modified: | 06 Jan 2010 15:25 |
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