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RF Plasma Synthesis and Deposition of Silicon Carbide Coatings

Schiller, G. and Bouyer, E. and Henne, R. and Müller, M. (1999) RF Plasma Synthesis and Deposition of Silicon Carbide Coatings. 14th International Symposium on Plasma Chemistry (ISPC-14), Prag, 02.-06.08.1999.

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Item URL in elib:https://elib.dlr.de/2652/
Document Type:Conference or Workshop Item (Speech)
Additional Information: LIDO-Berichtsjahr=2003,
Title:RF Plasma Synthesis and Deposition of Silicon Carbide Coatings
Authors:
AuthorsInstitution or Email of AuthorsAuthor's ORCID iDORCID Put Code
Schiller, G.UNSPECIFIEDUNSPECIFIEDUNSPECIFIED
Bouyer, E.UNSPECIFIEDUNSPECIFIEDUNSPECIFIED
Henne, R.UNSPECIFIEDUNSPECIFIEDUNSPECIFIED
Müller, M.UNSPECIFIEDUNSPECIFIEDUNSPECIFIED
Date:1999
Open Access:No
Gold Open Access:No
In SCOPUS:No
In ISI Web of Science:No
Page Range:pp. 1303-1308
Status:Published
Keywords:RF thermal plasma, silicon carbide coating
Event Title:14th International Symposium on Plasma Chemistry (ISPC-14), Prag, 02.-06.08.1999
HGF - Research field:Energy
HGF - Program:other
HGF - Program Themes:E - no assignment
DLR - Research area:Energy
DLR - Program:E - no assignment
DLR - Research theme (Project):UNSPECIFIED
Location: Stuttgart
Institutes and Institutions:Institute of Engineering Thermodynamics
Deposited By: DLR-Beauftragter, elib
Deposited On:16 Sep 2005
Last Modified:06 Jan 2010 15:24

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