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Hochskalierung des Heißdraht-CVD-Prozesses zur Diamantabscheidung

Heberle, N. and Heinze, J. and Meier, U. and Kohse-Höinghaus, K. (1993) Hochskalierung des Heißdraht-CVD-Prozesses zur Diamantabscheidung. DLR-Interner Bericht. Abschlußbericht im Rahmen des BMFT-Verbundprojekts 13 N586X, "Gasphasendiagnostik".

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Item URL in elib:https://elib.dlr.de/26514/
Document Type:Monograph (DLR-Interner Bericht)
Additional Information: LIDO-Berichtsjahr=1993,
Title:Hochskalierung des Heißdraht-CVD-Prozesses zur Diamantabscheidung
Authors:
AuthorsInstitution or Email of AuthorsAuthors ORCID iD
Heberle, N.UNSPECIFIEDUNSPECIFIED
Heinze, J.UNSPECIFIEDUNSPECIFIED
Meier, U.UNSPECIFIEDUNSPECIFIED
Kohse-Höinghaus, K.UNSPECIFIEDUNSPECIFIED
Date:1993
Open Access:No
Gold Open Access:No
In SCOPUS:No
In ISI Web of Science:No
Status:Published
HGF - Research field:Energy
HGF - Program:other
HGF - Program Themes:other
DLR - Research area:Energy
DLR - Program:no assignment
DLR - Research theme (Project):UNSPECIFIED
Location: Stuttgart
Institutes and Institutions:Institute of Combustion Technology > Institut für Physikalische Chemie der Verbrennung
Deposited By: DLR-Beauftragter, elib
Deposited On:02 Apr 2006
Last Modified:27 Apr 2009 06:14

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