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Staud, J. and Menschig, A. and Raiber, A. and Abeln, T. (1996) Laser-based fabrication of micro system components. In: Proc. Micro System Technologies '96 (1996) 772-774. VDE-Verlag GmbH, Berlin und Offenbach. 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, 17-19 September 1996.
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| Item URL in elib: | https://elib.dlr.de/25562/ | |||||||||||||||
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| Document Type: | Conference or Workshop Item (Paper) | |||||||||||||||
| Additional Information: | institution=H. Reichl, A. Heuberger (Ed.), LIDO-Berichtsjahr=1996, | |||||||||||||||
| Title: | Laser-based fabrication of micro system components. | |||||||||||||||
| Authors: |
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| Date: | 1996 | |||||||||||||||
| Journal or Publication Title: | Proc. Micro System Technologies '96 (1996) 772-774 | |||||||||||||||
| Open Access: | No | |||||||||||||||
| Gold Open Access: | No | |||||||||||||||
| In SCOPUS: | No | |||||||||||||||
| In ISI Web of Science: | No | |||||||||||||||
| Publisher: | VDE-Verlag GmbH, Berlin und Offenbach | |||||||||||||||
| Status: | Published | |||||||||||||||
| Keywords: | Laser tools, micro components | |||||||||||||||
| Event Title: | 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, 17-19 September 1996 | |||||||||||||||
| HGF - Research field: | UNSPECIFIED | |||||||||||||||
| HGF - Program: | Aeronautics | |||||||||||||||
| HGF - Program Themes: | other | |||||||||||||||
| DLR - Research area: | UNSPECIFIED | |||||||||||||||
| DLR - Program: | L - no assignment | |||||||||||||||
| DLR - Research theme (Project): | L - Laser Research and Technology (old) | |||||||||||||||
| Location: | Stuttgart | |||||||||||||||
| Institutes and Institutions: | Institute of Technical Physics | |||||||||||||||
| Deposited By: | DLR-Beauftragter, elib | |||||||||||||||
| Deposited On: | 02 Apr 2006 | |||||||||||||||
| Last Modified: | 27 Apr 2009 05:52 |
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