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Staud, J. and Menschig, A. and Raiber, A. and Abeln, T. (1996) Laser-based fabrication of micro system components. In: Proc. Micro System Technologies '96 (1996) 772-774. VDE-Verlag GmbH, Berlin und Offenbach. 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, 17-19 September 1996.
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| Item URL in elib: | https://elib.dlr.de/25562/ | ||||||||||||||||||||
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| Document Type: | Conference or Workshop Item (Paper) | ||||||||||||||||||||
| Additional Information: | institution=H. Reichl, A. Heuberger (Ed.), LIDO-Berichtsjahr=1996, | ||||||||||||||||||||
| Title: | Laser-based fabrication of micro system components. | ||||||||||||||||||||
| Authors: |
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| Date: | 1996 | ||||||||||||||||||||
| Journal or Publication Title: | Proc. Micro System Technologies '96 (1996) 772-774 | ||||||||||||||||||||
| Open Access: | No | ||||||||||||||||||||
| Gold Open Access: | No | ||||||||||||||||||||
| In SCOPUS: | No | ||||||||||||||||||||
| In ISI Web of Science: | No | ||||||||||||||||||||
| Publisher: | VDE-Verlag GmbH, Berlin und Offenbach | ||||||||||||||||||||
| Status: | Published | ||||||||||||||||||||
| Keywords: | Laser tools, micro components | ||||||||||||||||||||
| Event Title: | 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, 17-19 September 1996 | ||||||||||||||||||||
| HGF - Research field: | UNSPECIFIED | ||||||||||||||||||||
| HGF - Program: | Aeronautics | ||||||||||||||||||||
| HGF - Program Themes: | other | ||||||||||||||||||||
| DLR - Research area: | UNSPECIFIED | ||||||||||||||||||||
| DLR - Program: | L - no assignment | ||||||||||||||||||||
| DLR - Research theme (Project): | L - Laser Research and Technology (old) | ||||||||||||||||||||
| Location: | Stuttgart | ||||||||||||||||||||
| Institutes and Institutions: | Institute of Technical Physics | ||||||||||||||||||||
| Deposited By: | DLR-Beauftragter, elib | ||||||||||||||||||||
| Deposited On: | 02 Apr 2006 | ||||||||||||||||||||
| Last Modified: | 27 Apr 2009 05:52 |
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