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Bouyer, E. and Müller, M. and Schiller, G. and Henne, R. (1999) Conversion of silanes into SiC by RF plasma technology. In: Conference Proceedings UTSC 99, pp. 853-858. DVS-Verlag GmbH, Düsseldorf. UTSC (United Thermal Spray Conference) 99 - Coating in Practice, Düsseldorf, 17-19 March 1999. ISBN 3-87155-653-X.
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| Item URL in elib: | https://elib.dlr.de/2380/ | ||||||||||||||||||||
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| Document Type: | Conference or Workshop Item (Paper) | ||||||||||||||||||||
| Additional Information: | LIDO-Berichtsjahr=2000, | ||||||||||||||||||||
| Title: | Conversion of silanes into SiC by RF plasma technology | ||||||||||||||||||||
| Authors: |
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| Date: | 1999 | ||||||||||||||||||||
| Journal or Publication Title: | Conference Proceedings UTSC 99 | ||||||||||||||||||||
| Open Access: | No | ||||||||||||||||||||
| Gold Open Access: | No | ||||||||||||||||||||
| In SCOPUS: | No | ||||||||||||||||||||
| In ISI Web of Science: | No | ||||||||||||||||||||
| Page Range: | pp. 853-858 | ||||||||||||||||||||
| Editors: |
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| Publisher: | DVS-Verlag GmbH, Düsseldorf | ||||||||||||||||||||
| ISBN: | 3-87155-653-X | ||||||||||||||||||||
| Status: | Published | ||||||||||||||||||||
| Event Title: | UTSC (United Thermal Spray Conference) 99 - Coating in Practice, Düsseldorf, 17-19 March 1999 | ||||||||||||||||||||
| HGF - Research field: | Energy | ||||||||||||||||||||
| HGF - Program: | other | ||||||||||||||||||||
| HGF - Program Themes: | E - no assignment | ||||||||||||||||||||
| DLR - Research area: | Energy | ||||||||||||||||||||
| DLR - Program: | E - no assignment | ||||||||||||||||||||
| DLR - Research theme (Project): | UNSPECIFIED | ||||||||||||||||||||
| Location: | Stuttgart | ||||||||||||||||||||
| Institutes and Institutions: | Institute of Engineering Thermodynamics | ||||||||||||||||||||
| Deposited By: | DLR-Beauftragter, elib | ||||||||||||||||||||
| Deposited On: | 16 Sep 2005 | ||||||||||||||||||||
| Last Modified: | 06 Jan 2010 15:03 |
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