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Velthaus, Verena and Buchheim, Jakob (2024) Outgassing and Leak Rates of Bonding Technologies for Quantum Systems. In: 37th International Vacuum Nanoelectronics Conference, IVNC 2024, pp. 1-2. 37th International Vacuum Nanaelectronics Conference (IVNC), 2024-07-15 - 2024-07-19, Brno, Tschechien. doi: 10.1109/IVNC63480.2024.10652366. ISBN 9798350379754.
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Official URL: https://dx.doi.org/10.1109/IVNC63480.2024.10652366
Abstract
Miniaturization is the key parameter to bring quantum systems to commercialization. For sealing and characterization of miniaturized ultra-high vacuum cells for quantum systems, a new ultra-high vacuum system was developed. With the new setup we investigated different chip bonding methods and measured their outgassing and leak rates.
| Item URL in elib: | https://elib.dlr.de/213735/ | ||||||||||||
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| Document Type: | Conference or Workshop Item (Poster) | ||||||||||||
| Title: | Outgassing and Leak Rates of Bonding Technologies for Quantum Systems | ||||||||||||
| Authors: |
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| Date: | July 2024 | ||||||||||||
| Journal or Publication Title: | 37th International Vacuum Nanoelectronics Conference, IVNC 2024 | ||||||||||||
| Refereed publication: | No | ||||||||||||
| Open Access: | No | ||||||||||||
| Gold Open Access: | No | ||||||||||||
| In SCOPUS: | Yes | ||||||||||||
| In ISI Web of Science: | No | ||||||||||||
| DOI: | 10.1109/IVNC63480.2024.10652366 | ||||||||||||
| Page Range: | pp. 1-2 | ||||||||||||
| ISBN: | 9798350379754 | ||||||||||||
| Status: | Published | ||||||||||||
| Keywords: | Anodic Bonding, Outgassing, Leak rate, UHV, Quantum systems | ||||||||||||
| Event Title: | 37th International Vacuum Nanaelectronics Conference (IVNC) | ||||||||||||
| Event Location: | Brno, Tschechien | ||||||||||||
| Event Type: | international Conference | ||||||||||||
| Event Start Date: | 15 July 2024 | ||||||||||||
| Event End Date: | 19 July 2024 | ||||||||||||
| HGF - Research field: | Aeronautics, Space and Transport | ||||||||||||
| HGF - Program: | Space | ||||||||||||
| HGF - Program Themes: | Communication, Navigation, Quantum Technology | ||||||||||||
| DLR - Research area: | Raumfahrt | ||||||||||||
| DLR - Program: | R KNQ - Communication, Navigation, Quantum Technology | ||||||||||||
| DLR - Research theme (Project): | R - Integration platform for the miniaturisation of quantum optical systems | ||||||||||||
| Location: | Ulm | ||||||||||||
| Institutes and Institutions: | Institute of Quantum Technologies > Integration of Micro- and Nanosystems | ||||||||||||
| Deposited By: | Sopcic, Claudia | ||||||||||||
| Deposited On: | 16 Apr 2025 12:13 | ||||||||||||
| Last Modified: | 29 Aug 2025 10:57 |
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