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Bähnisch, R. and Groß, W. and Menschig, A. (2000) Single-shot, high repetition rate metallic pattern transfer. Microelectronic Engineering, 50, pp. 541-546.
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| Item URL in elib: | https://elib.dlr.de/2072/ | ||||||||||||||||
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| Document Type: | Article | ||||||||||||||||
| Additional Information: | LIDO-Berichtsjahr=2000, | ||||||||||||||||
| Title: | Single-shot, high repetition rate metallic pattern transfer | ||||||||||||||||
| Authors: |
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| Date: | 2000 | ||||||||||||||||
| Journal or Publication Title: | Microelectronic Engineering | ||||||||||||||||
| Refereed publication: | Yes | ||||||||||||||||
| Open Access: | No | ||||||||||||||||
| Gold Open Access: | No | ||||||||||||||||
| In SCOPUS: | No | ||||||||||||||||
| In ISI Web of Science: | Yes | ||||||||||||||||
| Volume: | 50 | ||||||||||||||||
| Page Range: | pp. 541-546 | ||||||||||||||||
| Status: | Published | ||||||||||||||||
| HGF - Research field: | Energy | ||||||||||||||||
| HGF - Program: | Aeronautics | ||||||||||||||||
| HGF - Program Themes: | other | ||||||||||||||||
| DLR - Research area: | Energy | ||||||||||||||||
| DLR - Program: | L - no assignment | ||||||||||||||||
| DLR - Research theme (Project): | L - Laser Research and Technology (old) | ||||||||||||||||
| Location: | Stuttgart | ||||||||||||||||
| Institutes and Institutions: | Institute of Technical Physics | ||||||||||||||||
| Deposited By: | DLR-Beauftragter, elib | ||||||||||||||||
| Deposited On: | 16 Sep 2005 | ||||||||||||||||
| Last Modified: | 06 Jan 2010 14:39 |
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