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Zhao, J.-X. and Hüttner, B. and Menschig, A. (1999) Micromachining with Ultrashort Laser Pulses. In: Laser Applications in Microelectronic and Optroelectronic Manufacturing IV, Vol. 3618, pp. 114-121. SPIE Bellingham, WA, USA. Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, San Jose, CA, USA, Jan 25-27, 1999. ISBN 0-8194-3088-9
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| Item URL in elib: | https://elib.dlr.de/2053/ | ||||||||||||
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| Document Type: | Conference or Workshop Item (Paper) | ||||||||||||
| Additional Information: | LIDO-Berichtsjahr=1999, | ||||||||||||
| Title: | Micromachining with Ultrashort Laser Pulses | ||||||||||||
| Authors: |
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| Date: | 1999 | ||||||||||||
| Journal or Publication Title: | Laser Applications in Microelectronic and Optroelectronic Manufacturing IV | ||||||||||||
| Open Access: | No | ||||||||||||
| Gold Open Access: | No | ||||||||||||
| In SCOPUS: | No | ||||||||||||
| In ISI Web of Science: | No | ||||||||||||
| Volume: | Vol. 3618 | ||||||||||||
| Page Range: | pp. 114-121 | ||||||||||||
| Editors: |
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| Publisher: | SPIE Bellingham, WA, USA | ||||||||||||
| ISBN: | 0-8194-3088-9 | ||||||||||||
| Status: | Published | ||||||||||||
| Keywords: | Femtosecond laser, materials processing | ||||||||||||
| Event Title: | Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, San Jose, CA, USA, Jan 25-27, 1999 | ||||||||||||
| Organizer: | SPIE | ||||||||||||
| HGF - Research field: | Energy | ||||||||||||
| HGF - Program: | Aeronautics | ||||||||||||
| HGF - Program Themes: | other | ||||||||||||
| DLR - Research area: | Energy | ||||||||||||
| DLR - Program: | L - no assignment | ||||||||||||
| DLR - Research theme (Project): | L - Laser Research and Technology (old) | ||||||||||||
| Location: | Stuttgart | ||||||||||||
| Institutes and Institutions: | Institute of Technical Physics | ||||||||||||
| Deposited By: | DLR-Beauftragter, elib | ||||||||||||
| Deposited On: | 16 Sep 2005 | ||||||||||||
| Last Modified: | 06 Jan 2010 14:37 |
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