Micromachining with Ultrashort Laser Pulses

Zhao, J.-X. and Hüttner, B. and Menschig, A. (1999) Micromachining with Ultrashort Laser Pulses. In: Laser Applications in Microelectronic and Optroelectronic Manufacturing IV, Vol. 3618, pp. 114-121. SPIE Bellingham, WA, USA. Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, San Jose, CA, USA, Jan 25-27, 1999. ISBN 0-8194-3088-9.

Full text not available from this repository.

Item URL in elib:

https://elib.dlr.de/2053/

Document Type:

Conference or Workshop Item (Paper)

Additional Information:

LIDO-Berichtsjahr=1999,

Title:

Micromachining with Ultrashort Laser Pulses

Authors:

Authors	Institution or Email of Authors	Author's ORCID iD
Zhao, J.-X.	UNSPECIFIED	UNSPECIFIED
Hüttner, B.	UNSPECIFIED	UNSPECIFIED
Menschig, A.	UNSPECIFIED	UNSPECIFIED

Date:

1999

Journal or Publication Title:

Laser Applications in Microelectronic and Optroelectronic Manufacturing IV

Open Access:

Gold Open Access:

In SCOPUS:

In ISI Web of Science:

Volume:

Vol. 3618

Page Range:

pp. 114-121

Editors:

Editors	Email	Editor's ORCID iD
Dubowski, J.J.	UNSPECIFIED	UNSPECIFIED
Helvajian, H.	UNSPECIFIED	UNSPECIFIED
Kreutz, E.W.	UNSPECIFIED	UNSPECIFIED
Sugioka, K.	UNSPECIFIED	UNSPECIFIED

Publisher:

SPIE Bellingham, WA, USA

ISBN:

0-8194-3088-9

Status:

Published

Keywords:

Femtosecond laser, materials processing

Event Title:

Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, San Jose, CA, USA, Jan 25-27, 1999

Organizer:

SPIE

HGF - Research field:

Energy

HGF - Program:

Aeronautics

HGF - Program Themes:

other

DLR - Research area:

Energy

DLR - Program:

L - no assignment

DLR - Research theme (Project):

L - Laser Research and Technology (old)

Location:

Stuttgart

Institutes and Institutions:

Institute of Technical Physics

Deposited By:

DLR-Beauftragter, elib

Deposited On:

16 Sep 2005

Last Modified:

06 Jan 2010 14:37

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