Zhao, J.-X. and Hüttner, B. and Menschig, A. (1999) Micromachining with Ultrashort Laser Pulses. In: Laser Applications in Microelectronic and Optroelectronic Manufacturing IV, Vol. 3618, pp. 114-121. SPIE Bellingham, WA, USA. Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, San Jose, CA, USA, Jan 25-27, 1999. ISBN 0-8194-3088-9.
Full text not available from this repository.
Item URL in elib: | https://elib.dlr.de/2053/ | |||||||||||||||
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Document Type: | Conference or Workshop Item (Paper) | |||||||||||||||
Additional Information: | LIDO-Berichtsjahr=1999, | |||||||||||||||
Title: | Micromachining with Ultrashort Laser Pulses | |||||||||||||||
Authors: |
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Date: | 1999 | |||||||||||||||
Journal or Publication Title: | Laser Applications in Microelectronic and Optroelectronic Manufacturing IV | |||||||||||||||
Open Access: | No | |||||||||||||||
Gold Open Access: | No | |||||||||||||||
In SCOPUS: | No | |||||||||||||||
In ISI Web of Science: | No | |||||||||||||||
Volume: | Vol. 3618 | |||||||||||||||
Page Range: | pp. 114-121 | |||||||||||||||
Editors: |
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Publisher: | SPIE Bellingham, WA, USA | |||||||||||||||
ISBN: | 0-8194-3088-9 | |||||||||||||||
Status: | Published | |||||||||||||||
Keywords: | Femtosecond laser, materials processing | |||||||||||||||
Event Title: | Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, San Jose, CA, USA, Jan 25-27, 1999 | |||||||||||||||
Organizer: | SPIE | |||||||||||||||
HGF - Research field: | Energy | |||||||||||||||
HGF - Program: | Aeronautics | |||||||||||||||
HGF - Program Themes: | other | |||||||||||||||
DLR - Research area: | Energy | |||||||||||||||
DLR - Program: | L - no assignment | |||||||||||||||
DLR - Research theme (Project): | L - Laser Research and Technology (old) | |||||||||||||||
Location: | Stuttgart | |||||||||||||||
Institutes and Institutions: | Institute of Technical Physics | |||||||||||||||
Deposited By: | DLR-Beauftragter, elib | |||||||||||||||
Deposited On: | 16 Sep 2005 | |||||||||||||||
Last Modified: | 06 Jan 2010 14:37 |
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