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Femtosecond laser-based technology for fast development of micromechanical devices

Bähnisch, R. and Groß, W. and Staud, J. and Menschig, A. (1999) Femtosecond laser-based technology for fast development of micromechanical devices. Sensors and Actuators, A 74, pp. 31-34.

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Item URL in elib:https://elib.dlr.de/2051/
Document Type:Article
Additional Information: LIDO-Berichtsjahr=1999,
Title:Femtosecond laser-based technology for fast development of micromechanical devices
Authors:
AuthorsInstitution or Email of AuthorsAuthors ORCID iD
Bähnisch, R.UNSPECIFIEDUNSPECIFIED
Groß, W.UNSPECIFIEDUNSPECIFIED
Staud, J.UNSPECIFIEDUNSPECIFIED
Menschig, A.UNSPECIFIEDUNSPECIFIED
Date:1999
Journal or Publication Title:Sensors and Actuators
Refereed publication:No
Open Access:No
Gold Open Access:No
In SCOPUS:No
In ISI Web of Science:No
Volume:A 74
Page Range:pp. 31-34
Status:Published
Keywords:Process technology, micromachining, Femtosecond laser, design concept, micromechanical device, micromanipulators
HGF - Research field:Energy
HGF - Program:Aeronautics
HGF - Program Themes:other
DLR - Research area:Energy
DLR - Program:L - no assignment
DLR - Research theme (Project):L - Laser Research and Technology (old)
Location: Stuttgart
Institutes and Institutions:Institute of Technical Physics
Deposited By: DLR-Beauftragter, elib
Deposited On:16 Sep 2005
Last Modified:06 Jan 2010 14:37

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