Advancements and challenges of MEMS microphones in aeroacoustics: A comprehensive overview

Abstract

The use of MEMS sensors as sensor for industrial measurement tasks promises beside the lower cost several advancement, meanly due to the small size of the sensors. In particular, the small size enables the possibility to integrate a high number of sensors with small distances an in a very small package. This enables the measurements of pressure fluctuations very close to each other and therefor the determination of small coherence length typical for instance of pressure fluctuations perpendicular to the flow in turbulent boundary layers (TBL). The small size of the sensor is also of advantage when integrating the sensors in microphone pads which then can be applied on the surface of the test object. The objective of the development of this measurement technique are experimental determination of pressure fluctuations in areas with strong pressure gradients.