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Ultra-thin NBN and TiN films for radiation sensors

Il´in, Konstantin and Siegel, Michael and Semenov, Alexey and Hübers, Heinz-Wilhelm and Hollmann, Evgeny (2005) Ultra-thin NBN and TiN films for radiation sensors. In: Kryoelektronische Bauelemente, p. 58. KRYO 2005, 205-10-09 - 2005-10-11, Bad Herrenalb.

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Abstract

Ultra-thin superconducting films are widely used for fabrication of modern radiation sensors. The advantages of the superconductor based devices are a low noise level, an outstanding sensitivity and a high operating rate. Any particular application of a superconducting sensor requires optimisation of relevant film properties. Here we report on the development of a dc magnetron sputtering prosesses for deposition of TiN and NbN thin films. Optimisation of the deposition regime of 10 nm thin films, e.g. sputtering rate and substrate temperature, allowed us to obtain transition temperatures 14 K and 4.3 K for NbN and TiN films, respectively.

Item URL in elib:https://elib.dlr.de/19884/
Document Type:Conference or Workshop Item (Poster)
Title:Ultra-thin NBN and TiN films for radiation sensors
Authors:
AuthorsInstitution or Email of AuthorsAuthors ORCID iD
Il´in, KonstantinInstitut für Mikro- und Nanoelektronische Systeme, Universität KarlsruheUNSPECIFIED
Siegel, MichaelInstitut für Mikro- und Nanoelektronische Systeme, Universität KarlsruheUNSPECIFIED
Semenov, AlexeyUNSPECIFIEDUNSPECIFIED
Hübers, Heinz-WilhelmUNSPECIFIEDUNSPECIFIED
Hollmann, EvgenyForschungszentrum JülichUNSPECIFIED
Date:2005
Journal or Publication Title:Kryoelektronische Bauelemente
Refereed publication:No
Open Access:No
Gold Open Access:No
In SCOPUS:No
In ISI Web of Science:No
Page Range:p. 58
Editors:
EditorsEmail
Institut für Mikro- und Nanoelektronische Systeme, Universität Karlsruhe, UNSPECIFIED
Status:Published
Keywords:Dünnschichtfilme, NbN, TiN, Detektor, Photonenzähler
Event Title:KRYO 2005
Event Location:Bad Herrenalb
Event Type:national Conference
Event Dates:205-10-09 - 2005-10-11
Organizer:Universität Karlsruhe
HGF - Research field:Aeronautics, Space and Transport (old)
HGF - Program:Space (old)
HGF - Program Themes:W EW - Erforschung des Weltraums
DLR - Research area:Space
DLR - Program:W EW - Erforschung des Weltraums
DLR - Research theme (Project):W - Projekt SOFIA (old)
Location: Berlin-Adlershof
Institutes and Institutions:Institute of Planetary Research > Terahertz and Infrared Sensors
Deposited By: Semenov, Prof.Dr. Alexey
Deposited On:11 Dec 2005
Last Modified:27 Apr 2009 04:44

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