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Il´in, Konstantin and Siegel, Michael and Semenov, Alexey and Hübers, Heinz-Wilhelm and Hollmann, Evgeny (2005) Ultra-thin NBN and TiN films for radiation sensors. In: Kryoelektronische Bauelemente, p. 58. KRYO 2005, 205-10-09 - 2005-10-11, Bad Herrenalb.
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Abstract
Ultra-thin superconducting films are widely used for fabrication of modern radiation sensors. The advantages of the superconductor based devices are a low noise level, an outstanding sensitivity and a high operating rate. Any particular application of a superconducting sensor requires optimisation of relevant film properties. Here we report on the development of a dc magnetron sputtering prosesses for deposition of TiN and NbN thin films. Optimisation of the deposition regime of 10 nm thin films, e.g. sputtering rate and substrate temperature, allowed us to obtain transition temperatures 14 K and 4.3 K for NbN and TiN films, respectively.
| Item URL in elib: | https://elib.dlr.de/19884/ | ||||||||||||||||||
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| Document Type: | Conference or Workshop Item (Poster) | ||||||||||||||||||
| Title: | Ultra-thin NBN and TiN films for radiation sensors | ||||||||||||||||||
| Authors: |
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| Date: | 2005 | ||||||||||||||||||
| Journal or Publication Title: | Kryoelektronische Bauelemente | ||||||||||||||||||
| Refereed publication: | No | ||||||||||||||||||
| Open Access: | No | ||||||||||||||||||
| Gold Open Access: | No | ||||||||||||||||||
| In SCOPUS: | No | ||||||||||||||||||
| In ISI Web of Science: | No | ||||||||||||||||||
| Page Range: | p. 58 | ||||||||||||||||||
| Editors: |
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| Status: | Published | ||||||||||||||||||
| Keywords: | Dünnschichtfilme, NbN, TiN, Detektor, Photonenzähler | ||||||||||||||||||
| Event Title: | KRYO 2005 | ||||||||||||||||||
| Event Location: | Bad Herrenalb | ||||||||||||||||||
| Event Type: | national Conference | ||||||||||||||||||
| Event Dates: | 205-10-09 - 2005-10-11 | ||||||||||||||||||
| Organizer: | Universität Karlsruhe | ||||||||||||||||||
| HGF - Research field: | Aeronautics, Space and Transport (old) | ||||||||||||||||||
| HGF - Program: | Space (old) | ||||||||||||||||||
| HGF - Program Themes: | W EW - Erforschung des Weltraums | ||||||||||||||||||
| DLR - Research area: | Space | ||||||||||||||||||
| DLR - Program: | W EW - Erforschung des Weltraums | ||||||||||||||||||
| DLR - Research theme (Project): | W - Projekt SOFIA (old) | ||||||||||||||||||
| Location: | Berlin-Adlershof | ||||||||||||||||||
| Institutes and Institutions: | Institute of Planetary Research > Terahertz and Infrared Sensors | ||||||||||||||||||
| Deposited By: | Semenov, Prof.Dr. Alexey | ||||||||||||||||||
| Deposited On: | 11 Dec 2005 | ||||||||||||||||||
| Last Modified: | 27 Apr 2009 04:44 |
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