Ultra-thin NBN and TiN films for radiation sensors

Kurzfassung

Ultra-thin superconducting films are widely used for fabrication of modern radiation sensors. The advantages of the superconductor based devices are a low noise level, an outstanding sensitivity and a high operating rate. Any particular application of a superconducting sensor requires optimisation of relevant film properties. Here we report on the development of a dc magnetron sputtering prosesses for deposition of TiN and NbN thin films. Optimisation of the deposition regime of 10 nm thin films, e.g. sputtering rate and substrate temperature, allowed us to obtain transition temperatures 14 K and 4.3 K for NbN and TiN films, respectively.