Choice of the Miniature Inertial Optomechanical Sensor Geometric Parameters with the Help of Their Mechanical Characteristics Modelling

Kurzfassung

In this paper, the mechanical characteristics of a miniature optomechanical accelerometer, similar to those proposed for a wide range of applications, have been investigated. With the help of numerical modelling, characteristics such as eigenfrequencies, quality factor, displacement magnitude, normalized translations, normalized rotations versus eigenfrequencies, as well as spatial distributions of the azimuthal and axial displacements and stored energy density in a wide frequency range starting from the stationary case have been obtained. Dependencies of the main mechanical characteristics versus the minimal and maximal system dimensions have been plotted. Geometries of the optomechanical accelerometers with micron size parts providing the low and the high first eigenfrequencies are presented. It is shown that via the choice of the geometrical parameters, the minimal measured acceleration level can be raised substantially.