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Correlative microscopy using SEM based nano-CT

Fell, Jonas and Fabian, Lutter and Christoph, Pauly and Michael, Engstler and Feng, Han and Rémi, Costa and Simon, Zabler and Michael, Maisl and Frank, Mücklich and Randolf, Hanke and Hans-Georg, Herrmann (2023) Correlative microscopy using SEM based nano-CT. In: X-Ray Nanoimaging: Instruments and Methods VI 2023, 12698. SPIE Optics + Photonics, 2023-08-20 - 2023-08-24, San Diego, California, United States. doi: 10.1117/12.2677235. ISBN 978-151066610-8. ISSN 0277-786X.

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Abstract

Besides electron imaging in scanning electron microscopy (SEM), techniques like energy dispersive X-ray spectroscopy (EDX) or electron backscatter diffraction (EBSD) are widely established. With integration of a target holder and a pixelated X-ray detector, X-ray computed tomography (CT) in SEM can be realized and extends the modalities of materials characterization in one instrument. For nano-CT mode, an electron beam is focused on a suitable target leading to X-ray emission. While passing through a specimen, X-rays are differently attenuated depending on their material properties and detected by a direct converting X-ray detector afterward. Presented is a SEM-based nano-CT called XRM-II nanoCT and different applications of correlative microscopy using electron imaging, energy dispersive X-ray spectroscopy and CT. Besides multiscale investigation on materials for fuel cells and electrolysers by 3D visualization with micro- and nano-CT, nano-CT characterization of a catalytic converter with additional chemical analysis is depicted. At last, time-resolved imaging of morphology changes in an annealed Al alloy using nano-CT is presented. Results show grain coarsening as well as precipitations in the range of 200 – 1200 nm.

Item URL in elib:https://elib.dlr.de/198005/
Document Type:Conference or Workshop Item (Speech)
Title:Correlative microscopy using SEM based nano-CT
Authors:
AuthorsInstitution or Email of AuthorsAuthor's ORCID iDORCID Put Code
Fell, JonasLightweight Systems, Saarland University, Campus E3 1, 66123 Saarbrücken, GermanyUNSPECIFIEDUNSPECIFIED
Fabian, LutterX-ray Microscopy, University Würzburg, Josef-Martin-Weg 63, 97074 Würzburg, GermanyUNSPECIFIEDUNSPECIFIED
Christoph, PaulyFunctional Materials, Saarland University, Campus D3 3, 66123 Saarbücken, GermanyUNSPECIFIEDUNSPECIFIED
Michael, EngstlerFunctional Materials, Saarland University, Campus D3 3, 66123 Saarbücken, GermanyUNSPECIFIEDUNSPECIFIED
Feng, HanInstitute of Engineering Thermodynamics, German Aerospace Centre (DLR), Pfaffenwaldring 38-40, 70569 Stuttgart, GermanyUNSPECIFIEDUNSPECIFIED
Rémi, CostaInstitute of Engineering Thermodynamics, German Aerospace Centre (DLR), Pfaffenwaldring 38-40, 70569 Stuttgart, GermanyUNSPECIFIEDUNSPECIFIED
Simon, ZablerFraunhofer Development Center X-ray Technology EZRT, 97074 Würzburg, GermanyUNSPECIFIEDUNSPECIFIED
Michael, MaislFraunhofer Institute for Nondestructive Testing IZFP, Campus E3 1, 66123 Saarbrücken, GermanyUNSPECIFIEDUNSPECIFIED
Frank, MücklichFunctional Materials, Saarland University, Campus D3 3, 66123 Saarbücken, GermanyUNSPECIFIEDUNSPECIFIED
Randolf, HankeX-ray Microscopy, University Würzburg, Josef-Martin-Weg 63, 97074 Würzburg, GermanyUNSPECIFIEDUNSPECIFIED
Hans-Georg, HerrmannLightweight Systems, Saarland University, Campus E3 1, 66123 Saarbrücken, GermanyUNSPECIFIEDUNSPECIFIED
Date:5 October 2023
Journal or Publication Title:X-Ray Nanoimaging: Instruments and Methods VI 2023
Refereed publication:Yes
Open Access:No
Gold Open Access:No
In SCOPUS:Yes
In ISI Web of Science:No
Volume:12698
DOI:10.1117/12.2677235
Series Name:Proc. of SPIE
ISSN:0277-786X
ISBN:978-151066610-8
Status:Published
Keywords:X-ray tomography, nano-CT, SEM based CT, correlative microscopy, fuel cell and electrolyser, catalytic converter, aluminum alloy
Event Title:SPIE Optics + Photonics
Event Location:San Diego, California, United States
Event Type:international Conference
Event Start Date:20 August 2023
Event End Date:24 August 2023
HGF - Research field:Energy
HGF - Program:Materials and Technologies for the Energy Transition
HGF - Program Themes:Chemical Energy Carriers
DLR - Research area:Energy
DLR - Program:E SP - Energy Storage
DLR - Research theme (Project):E - Electrochemical Processes
Location: Stuttgart
Institutes and Institutions:Institute of Engineering Thermodynamics > Electrochemical Energy Technology
Deposited By: Han, Feng
Deposited On:27 Oct 2023 14:43
Last Modified:24 Apr 2024 20:58

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