elib
DLR-Header
DLR-Logo -> http://www.dlr.de
DLR Portal Home | Imprint | Privacy Policy | Contact | Deutsch
Fontsize: [-] Text [+]

Shallow donor complexes formed by high temperature diffusion of magnesium in silicon

Pavlov, Sergey and Astrov, Yu. A. and Portsel, L. M. and Shuman, V. B. and Lodygin, A. N. and Abrosimov, N. V. and Hübers, Heinz-Wilhelm (2022) Shallow donor complexes formed by high temperature diffusion of magnesium in silicon. 19th Conference on Gettering and Defect Engineering in Semiconductor Technology, 2022-09-10 - 2022-09-16, Mondsee, Österreich. (Unpublished)

[img] PDF
171kB

Item URL in elib:https://elib.dlr.de/190360/
Document Type:Conference or Workshop Item (Speech)
Title:Shallow donor complexes formed by high temperature diffusion of magnesium in silicon
Authors:
AuthorsInstitution or Email of AuthorsAuthor's ORCID iDORCID Put Code
Pavlov, SergeyUNSPECIFIEDUNSPECIFIEDUNSPECIFIED
Astrov, Yu. A.Ioffe Physical-Technical Institute, St. Petersburg, RussiaUNSPECIFIEDUNSPECIFIED
Portsel, L. M.Ioffe Physical-Technical Institute, St. Petersburg, RussiaUNSPECIFIEDUNSPECIFIED
Shuman, V. B.Ioffe Physical-Technical Institute, St. Petersburg, RussiaUNSPECIFIEDUNSPECIFIED
Lodygin, A. N.Ioffe Physical-Technical Institute, St. Petersburg, RussiaUNSPECIFIEDUNSPECIFIED
Abrosimov, N. V.Leibniz-Institut für Kristallzüchtung (IKZ), BerlinUNSPECIFIEDUNSPECIFIED
Hübers, Heinz-WilhelmUNSPECIFIEDUNSPECIFIEDUNSPECIFIED
Date:2022
Refereed publication:Yes
Open Access:Yes
Gold Open Access:No
In SCOPUS:No
In ISI Web of Science:No
Status:Unpublished
Keywords:silicon technology, diffusion doping
Event Title:19th Conference on Gettering and Defect Engineering in Semiconductor Technology
Event Location:Mondsee, Österreich
Event Type:international Conference
Event Start Date:10 September 2022
Event End Date:16 September 2022
Organizer:Institut für Halbleiter- und Festkörperphysik, Johannes Kepler University Linz
HGF - Research field:Aeronautics, Space and Transport
HGF - Program:Space
HGF - Program Themes:Space System Technology
DLR - Research area:Raumfahrt
DLR - Program:R SY - Space System Technology
DLR - Research theme (Project):R - Detectors for optical instruments
Location: Berlin-Adlershof
Institutes and Institutions:Institute of Optical Sensor Systems > Terahertz and Laser Spectroscopy
Deposited By: Pavlov, Dr. Sergey
Deposited On:21 Nov 2022 12:50
Last Modified:24 Apr 2024 20:51

Repository Staff Only: item control page

Browse
Search
Help & Contact
Information
electronic library is running on EPrints 3.3.12
Website and database design: Copyright © German Aerospace Center (DLR). All rights reserved.