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Decomposition of the solid solution of interstitial magnesium in silicon

Astrov, Yu. A. and Shuman, V. B. and Portsel, L. M. and Lodygin, A. N. and Pavlov, Sergey and Abrosimov, N. V. and Hübers, Heinz-Wilhelm (2019) Decomposition of the solid solution of interstitial magnesium in silicon. 18th Conference Gettering and Defect Engineering in Semiconductor Technology, 22.-27. Sep. 2019, Zeuthen, Germany.

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Item URL in elib:https://elib.dlr.de/133612/
Document Type:Conference or Workshop Item (Poster)
Title:Decomposition of the solid solution of interstitial magnesium in silicon
Authors:
AuthorsInstitution or Email of AuthorsAuthors ORCID iD
Astrov, Yu. A.Ioffe Physical-Technical Institute, St. Petersburg, RussiaUNSPECIFIED
Shuman, V. B.Ioffe Physical-Technical Institute, St. Petersburg, RussiaUNSPECIFIED
Portsel, L. M.Ioffe Physical-Technical Institute, St. Petersburg, RussiaUNSPECIFIED
Lodygin, A. N.Ioffe Physical-Technical Institute, St. Petersburg, RussiaUNSPECIFIED
Pavlov, SergeySergeij.Pavlov (at) dlr.deUNSPECIFIED
Abrosimov, N. V.Leibniz-Institut für Kristallzüchtung (IKZ), BerlinUNSPECIFIED
Hübers, Heinz-WilhelmHeinz-Wilhelm.Huebers (at) dlr.deUNSPECIFIED
Date:24 September 2019
Refereed publication:Yes
Open Access:No
Gold Open Access:No
In SCOPUS:No
In ISI Web of Science:No
Status:Published
Keywords:Diffusion Doping, silicon
Event Title:18th Conference Gettering and Defect Engineering in Semiconductor Technology
Event Location:Zeuthen, Germany
Event Type:international Conference
Event Dates:22.-27. Sep. 2019
HGF - Research field:Aeronautics, Space and Transport
HGF - Program:Space
HGF - Program Themes:Space Technology
DLR - Research area:Raumfahrt
DLR - Program:R SY - Technik für Raumfahrtsysteme
DLR - Research theme (Project):R - Vorhaben OptoRob
Location: Berlin-Adlershof
Institutes and Institutions:Institute of Optical Sensor Systems > Terahertz and Laser Spectroscopy
Deposited By: Pavlov, Dr. Sergey
Deposited On:17 Jan 2020 09:25
Last Modified:17 Jan 2020 09:25

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