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Decomposition of the solid solution of interstitial magnesium in silicon

Astrov, Yu. A. and Shuman, V. B. and Portsel, L. M. and Lodygin, A. N. and Pavlov, Sergey and Abrosimov, N. V. and Hübers, Heinz-Wilhelm (2019) Decomposition of the solid solution of interstitial magnesium in silicon. 18th Conference Gettering and Defect Engineering in Semiconductor Technology, 2019-09-22 - 2019-09-27, Zeuthen, Germany.

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Item URL in elib:https://elib.dlr.de/133612/
Document Type:Conference or Workshop Item (Poster)
Title:Decomposition of the solid solution of interstitial magnesium in silicon
Authors:
AuthorsInstitution or Email of AuthorsAuthor's ORCID iDORCID Put Code
Astrov, Yu. A.Ioffe Physical-Technical Institute, St. Petersburg, RussiaUNSPECIFIEDUNSPECIFIED
Shuman, V. B.Ioffe Physical-Technical Institute, St. Petersburg, RussiaUNSPECIFIEDUNSPECIFIED
Portsel, L. M.Ioffe Physical-Technical Institute, St. Petersburg, RussiaUNSPECIFIEDUNSPECIFIED
Lodygin, A. N.Ioffe Physical-Technical Institute, St. Petersburg, RussiaUNSPECIFIEDUNSPECIFIED
Pavlov, SergeyUNSPECIFIEDUNSPECIFIEDUNSPECIFIED
Abrosimov, N. V.Leibniz-Institut für Kristallzüchtung (IKZ), BerlinUNSPECIFIEDUNSPECIFIED
Hübers, Heinz-WilhelmUNSPECIFIEDUNSPECIFIEDUNSPECIFIED
Date:24 September 2019
Refereed publication:Yes
Open Access:No
Gold Open Access:No
In SCOPUS:No
In ISI Web of Science:No
Status:Published
Keywords:Diffusion Doping, silicon
Event Title:18th Conference Gettering and Defect Engineering in Semiconductor Technology
Event Location:Zeuthen, Germany
Event Type:international Conference
Event Start Date:22 September 2019
Event End Date:27 September 2019
HGF - Research field:Aeronautics, Space and Transport
HGF - Program:Space
HGF - Program Themes:Space System Technology
DLR - Research area:Raumfahrt
DLR - Program:R SY - Space System Technology
DLR - Research theme (Project):R - Vorhaben OptoRob (old)
Location: Berlin-Adlershof
Institutes and Institutions:Institute of Optical Sensor Systems > Terahertz and Laser Spectroscopy
Deposited By: Pavlov, Dr. Sergey
Deposited On:17 Jan 2020 09:25
Last Modified:24 Apr 2024 20:36

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