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Structural and Functional Properties of the Thin-Film System Ti-Ni-Si

Wambach, Matthias and Ziolkowski, Pawel and Müller, Eckhard and Ludwig, Alfred (2019) Structural and Functional Properties of the Thin-Film System Ti-Ni-Si. ACS Combinatorial Science. American Chemical society (ACS). DOI: 10.1021/acscombsci.8b00181 ISSN 2156-8952

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Abstract

The thin film system Ti–Ni–Si was investigated using methods of combinatorial materials science. A thin film composition spread library of the system was fabricated using combinatorial magnetron sputtering. The functional properties Seebeck coefficient, electrical resistivity, and luminance were determined using high-throughput characterization techniques. A thin-film phase diagram was established by the assessment of high-throughput X-ray diffraction results. Correlations between composition, phase constitution, and functional properties with focus on the binary composition space are discussed.

Item URL in elib:https://elib.dlr.de/130518/
Document Type:Article
Title:Structural and Functional Properties of the Thin-Film System Ti-Ni-Si
Authors:
AuthorsInstitution or Email of AuthorsAuthor's ORCID iD
Wambach, MatthiasChair of MEMS Materials, Institute for Materials, Ruhr-University Bochum, Universitaetsstrasse 150, D-44801 Bochum, GermanyUNSPECIFIED
Ziolkowski, PawelGerman Aerospace Center, Institute of Materials Research, Köln, GermanyUNSPECIFIED
Müller, EckhardInstitute of Materials Research, German Aerospace Center (DLR), Institute of Materials Research – Thermoelectric Materials and Systems, 51147 Köln Porz-Wahnheide, Linder Höhe, Germany and Justus Liebig University Giessen, Institute of Inorganic and AnalytUNSPECIFIED
Ludwig, AlfredChair of MEMS Materials, Institute for Materials, Ruhr-University Bochum, Universitaetsstrasse 150, D-44801 Bochum, GermanyUNSPECIFIED
Date:1 March 2019
Journal or Publication Title:ACS Combinatorial Science
Refereed publication:Yes
Open Access:Yes
Gold Open Access:No
In SCOPUS:Yes
In ISI Web of Science:Yes
DOI :10.1021/acscombsci.8b00181
Publisher:American Chemical society (ACS)
ISSN:2156-8952
Status:Published
Keywords:Thin films; sputtering; Seebeck coefficient; structure−property relationships
HGF - Research field:Aeronautics, Space and Transport
HGF - Program:Transport
HGF - Program Themes:Road Transport
DLR - Research area:Transport
DLR - Program:V ST Straßenverkehr
DLR - Research theme (Project):V - NGC Antriebssystem und Energiemanagement
Location: Köln-Porz
Institutes and Institutions:Institute of Materials Research > Thermoelectric Materials and Systems
Deposited By: Yasseri, Mohammad
Deposited On:14 Nov 2019 17:36
Last Modified:01 Mar 2020 03:00

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