Overlayer thickness determination based on XPS no-loss peaks ratio

Afanas'ev, Viktor P. and Kaplya, Pavel S. and Efremenko, Dmitry (2017) Overlayer thickness determination based on XPS no-loss peaks ratio. In: Sources, Interactions with Matter, Detection and Analysis of Low Energy Electrons. SIMDALEE2017, 18.-22. Sept. 2017, Sardinia, Italy.

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Official URL: http://www.iap.tuwien.ac.at/www/_media/simdalee2017/boa_final_simdalee_c2.pdf

Item URL in elib:

https://elib.dlr.de/120397/

Document Type:

Conference or Workshop Item (Speech)

Title:

Overlayer thickness determination based on XPS no-loss peaks ratio

Authors:

Authors	Institution or Email of Authors	Author's ORCID iD
Afanas'ev, Viktor P.	National Research University "Moscow Power Engineering Institute", Russia	UNSPECIFIED
Kaplya, Pavel S.	National Research University "Moscow Power Engineering Institute", Russia	UNSPECIFIED
Efremenko, Dmitry	UNSPECIFIED	UNSPECIFIED

Date:

2017

Journal or Publication Title:

Sources, Interactions with Matter, Detection and Analysis of Low Energy Electrons

Refereed publication:

Open Access:

Yes

Gold Open Access:

In SCOPUS:

In ISI Web of Science:

Editors:

Editors	Email	Editor's ORCID iD
Werner, Wolfgang S.M	UNSPECIFIED	UNSPECIFIED
Astasauskas, Vytautas	UNSPECIFIED	UNSPECIFIED
Ridzel, Olga	UNSPECIFIED	UNSPECIFIED

Status:

Published

Keywords:

XPS, retrieval, transport equation

Event Title:

SIMDALEE2017

Event Location:

Sardinia, Italy

Event Type:

international Conference

Event Dates:

18.-22. Sept. 2017

HGF - Research field:

Aeronautics, Space and Transport

HGF - Program:

Space

HGF - Program Themes:

Research under Space Conditions

DLR - Research area:

Raumfahrt

DLR - Program:

R FR - Research under Space Conditions

DLR - Research theme (Project):

R - Material Design and New Materials

Location:

Oberpfaffenhofen

Institutes and Institutions:

Remote Sensing Technology Institute > Atmospheric Processors

Deposited By:

Efremenko, Dr Dmitry

Deposited On:

18 Jun 2018 14:03

Last Modified:

31 Jul 2019 20:18

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