Charaev, Ilya and Silbernagel, T and Bachowsky, B and Kuzmin, Artem and Doerner, Stefan and Ilin, Konstantin and Semenov, Alexey and Roditchev, D and Vodolazov, Denis and Siegel, Michael (2017) Enhancement of superconductivity in NbN nanowires by negative electron-beam lithography with positive resist. Journal of Applied Physics. American Institute of Physics (AIP). doi: 10.1063/1.4986416. ISSN 0021-8979.
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Abstract
We performed comparative experimental investigation of superconducting NbN nanowires which were prepared by means of positive- and negative electron-beam lithography with the same positive tone Poly-methyl-methacrylate (PMMA) resist. We show that nanowires with a thickness 4.9 nm and widths less than 100 nm demonstrate at 4.2K higher critical temperature and higher density of critical and retrapping currents when they are prepared by negative lithography. Also the ratio of the experimental critical current to the depairing critical current is larger for nanowires prepared by negative lithography. We associate the observed enhancement of superconducting properties with the difference in the degree of damage that nanowire edges sustain in the lithographic process. A whole range of advantages which is offered by the negative lithography with positive PMMA resist ensures high potential of this technology for improving the performance metrics of superconducting nanowire singe-photon detectors.
Item URL in elib: | https://elib.dlr.de/113880/ | ||||||||||||||||||||||||||||||||||||||||||||
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Document Type: | Article | ||||||||||||||||||||||||||||||||||||||||||||
Title: | Enhancement of superconductivity in NbN nanowires by negative electron-beam lithography with positive resist | ||||||||||||||||||||||||||||||||||||||||||||
Authors: |
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Date: | 22 August 2017 | ||||||||||||||||||||||||||||||||||||||||||||
Journal or Publication Title: | Journal of Applied Physics | ||||||||||||||||||||||||||||||||||||||||||||
Refereed publication: | Yes | ||||||||||||||||||||||||||||||||||||||||||||
Open Access: | No | ||||||||||||||||||||||||||||||||||||||||||||
Gold Open Access: | No | ||||||||||||||||||||||||||||||||||||||||||||
In SCOPUS: | Yes | ||||||||||||||||||||||||||||||||||||||||||||
In ISI Web of Science: | Yes | ||||||||||||||||||||||||||||||||||||||||||||
DOI: | 10.1063/1.4986416 | ||||||||||||||||||||||||||||||||||||||||||||
Publisher: | American Institute of Physics (AIP) | ||||||||||||||||||||||||||||||||||||||||||||
ISSN: | 0021-8979 | ||||||||||||||||||||||||||||||||||||||||||||
Status: | Published | ||||||||||||||||||||||||||||||||||||||||||||
Keywords: | nanowires, lithography, critical current | ||||||||||||||||||||||||||||||||||||||||||||
HGF - Research field: | Aeronautics, Space and Transport | ||||||||||||||||||||||||||||||||||||||||||||
HGF - Program: | Space | ||||||||||||||||||||||||||||||||||||||||||||
HGF - Program Themes: | Space System Technology | ||||||||||||||||||||||||||||||||||||||||||||
DLR - Research area: | Raumfahrt | ||||||||||||||||||||||||||||||||||||||||||||
DLR - Program: | R SY - Space System Technology | ||||||||||||||||||||||||||||||||||||||||||||
DLR - Research theme (Project): | Vorhaben Quantensensorik (old) | ||||||||||||||||||||||||||||||||||||||||||||
Location: | Berlin-Adlershof | ||||||||||||||||||||||||||||||||||||||||||||
Institutes and Institutions: | Institute of Optical Sensor Systems > Terahertz and Laser Spectroscopy | ||||||||||||||||||||||||||||||||||||||||||||
Deposited By: | Semenov, Prof.Dr. Alexey | ||||||||||||||||||||||||||||||||||||||||||||
Deposited On: | 05 Sep 2017 14:35 | ||||||||||||||||||||||||||||||||||||||||||||
Last Modified: | 18 Dec 2019 04:19 |
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