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Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters

Brick, Delia and Emre, Erkan and Grossmann, Martin and Dekorsy, Thomas and Hettich, Mike (2017) Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters. Applied Sciences, 7 (8), p. 822. Multidisciplinary Digital Publishing Institute (MDPI). DOI: 10.3390/app7080822 ISSN 2076-3417

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Official URL: http://dx.doi.org/10.3390/app7080822

Abstract

Many applications of thin films necessitate detailed information about their thicknesses and sound velocities. Here, we study SiO2/LiNbO3 layer systems by picosecond photoacoustic metrology and measure the sound velocities of the respective layers and the film thickness of SiO2, which pose crucial information for the fabrication of surface-acoustic-wave filters for communication technology. Additionally, we utilize the birefringence and the accompanying change in the detection sensitivity of coherent acoustic phonons in the LiNbO3 layer to infer information about the LiNbO3 orientation and the layer interface.

Item URL in elib:https://elib.dlr.de/113842/
Document Type:Article
Title:Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters
Authors:
AuthorsInstitution or Email of AuthorsAuthors ORCID iD
Brick, Deliakonstanz universityUNSPECIFIED
Emre, Erkankonstanz universityUNSPECIFIED
Grossmann, Martinkonstanz universityUNSPECIFIED
Dekorsy, Thomasinstitute of technical physics, dlrhttps://orcid.org/0000-0003-2257-2854
Hettich, Mikekonstanz universityUNSPECIFIED
Date:10 August 2017
Journal or Publication Title:Applied Sciences
Refereed publication:Yes
Open Access:Yes
Gold Open Access:Yes
In SCOPUS:Yes
In ISI Web of Science:No
Volume:7
DOI :10.3390/app7080822
Page Range:p. 822
Publisher:Multidisciplinary Digital Publishing Institute (MDPI)
ISSN:2076-3417
Status:Published
Keywords:photoacoustics, metrology, SAW, laser ultrasonics
HGF - Research field:Aeronautics, Space and Transport
HGF - Program:Aeronautics
HGF - Program Themes:fixed-wing aircraft
DLR - Research area:Aeronautics
DLR - Program:L AR - Aircraft Research
DLR - Research theme (Project):L - Laser Research and Technology
Location: Stuttgart
Institutes and Institutions:Institute of Technical Physics
Deposited By: Dekorsy, Prof. Dr. Thomas
Deposited On:30 Aug 2017 10:32
Last Modified:21 May 2019 05:02

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