Brick, Delia und Emre, Erkan und Grossmann, Martin und Dekorsy, Thomas und Hettich, Mike (2017) Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters. Applied Sciences, 7 (8), Seite 822. Multidisciplinary Digital Publishing Institute (MDPI). doi: 10.3390/app7080822. ISSN 2076-3417.
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Offizielle URL: http://dx.doi.org/10.3390/app7080822
Kurzfassung
Many applications of thin films necessitate detailed information about their thicknesses and sound velocities. Here, we study SiO2/LiNbO3 layer systems by picosecond photoacoustic metrology and measure the sound velocities of the respective layers and the film thickness of SiO2, which pose crucial information for the fabrication of surface-acoustic-wave filters for communication technology. Additionally, we utilize the birefringence and the accompanying change in the detection sensitivity of coherent acoustic phonons in the LiNbO3 layer to infer information about the LiNbO3 orientation and the layer interface.
elib-URL des Eintrags: | https://elib.dlr.de/113842/ | ||||||||||||||||||||||||
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Dokumentart: | Zeitschriftenbeitrag | ||||||||||||||||||||||||
Titel: | Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters | ||||||||||||||||||||||||
Autoren: |
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Datum: | 10 August 2017 | ||||||||||||||||||||||||
Erschienen in: | Applied Sciences | ||||||||||||||||||||||||
Referierte Publikation: | Ja | ||||||||||||||||||||||||
Open Access: | Ja | ||||||||||||||||||||||||
Gold Open Access: | Ja | ||||||||||||||||||||||||
In SCOPUS: | Ja | ||||||||||||||||||||||||
In ISI Web of Science: | Ja | ||||||||||||||||||||||||
Band: | 7 | ||||||||||||||||||||||||
DOI: | 10.3390/app7080822 | ||||||||||||||||||||||||
Seitenbereich: | Seite 822 | ||||||||||||||||||||||||
Verlag: | Multidisciplinary Digital Publishing Institute (MDPI) | ||||||||||||||||||||||||
ISSN: | 2076-3417 | ||||||||||||||||||||||||
Status: | veröffentlicht | ||||||||||||||||||||||||
Stichwörter: | photoacoustics, metrology, SAW, laser ultrasonics | ||||||||||||||||||||||||
HGF - Forschungsbereich: | Luftfahrt, Raumfahrt und Verkehr | ||||||||||||||||||||||||
HGF - Programm: | Luftfahrt | ||||||||||||||||||||||||
HGF - Programmthema: | Flugzeuge | ||||||||||||||||||||||||
DLR - Schwerpunkt: | Luftfahrt | ||||||||||||||||||||||||
DLR - Forschungsgebiet: | L AR - Aircraft Research | ||||||||||||||||||||||||
DLR - Teilgebiet (Projekt, Vorhaben): | L - Laserforschung und Technologie (alt) | ||||||||||||||||||||||||
Standort: | Stuttgart | ||||||||||||||||||||||||
Institute & Einrichtungen: | Institut für Technische Physik | ||||||||||||||||||||||||
Hinterlegt von: | Dekorsy, Prof. Dr. Thomas | ||||||||||||||||||||||||
Hinterlegt am: | 30 Aug 2017 10:32 | ||||||||||||||||||||||||
Letzte Änderung: | 14 Dez 2019 04:24 |
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