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Software tools for profile analysis of multi-layered systems by using the Elastic Peak Electron Spectroscopy

Afanas'ev, Victor P. and Gryazev, Alexander S. and Kaplya, Pavel S. and Efremenko, Dmitry and Ridzel, Olga Yu. (2016) Software tools for profile analysis of multi-layered systems by using the Elastic Peak Electron Spectroscopy. In: 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD), pp. 34-37. Institute of Electrical and Electronics Engineers (IEEE). Atomic Layer Deposition (BALD), 2. - 4. Okt. 2016, St.Petersburg, Russia. DOI: 10.1109/BALD.2016.7886531 ISBN 978-5-9651-0997-5

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Official URL: http://dx.doi.org/10.1109/BALD.2016.7886531

Abstract

The new generation of spectrometers with high energy resolution can resolve elastic peaks of electrons reflected by atoms in solids. In this regard, there is an increasing interest in the applications of the so-called Elastic Peak Electron Spectroscopy (EPES) for measuring composition-versus-depth profiles since it is non-destructive and sensible to the presence of hydrogen in solids. This study presents numerical tools for quantitative interpretation of the EPES signal. They include modules for peak detecting, estimating the elastic peak intensities and retrieving composition-versus-depth profiles. The latter is based on the transport theory and invokes the straight line approximation (SLA). The examples of profile retrieval using the SLA are given. The accuracy of the proposed model is analyzed. Software Tools for Profile Analysis of Multi-Layered Systems by Using the Elastic Peak Electron Spectroscopy.

Item URL in elib:https://elib.dlr.de/111865/
Document Type:Conference or Workshop Item (Speech)
Title:Software tools for profile analysis of multi-layered systems by using the Elastic Peak Electron Spectroscopy
Authors:
AuthorsInstitution or Email of AuthorsAuthors ORCID iD
Afanas'ev, Victor P.UNSPECIFIEDUNSPECIFIED
Gryazev, Alexander S.UNSPECIFIEDUNSPECIFIED
Kaplya, Pavel S.UNSPECIFIEDUNSPECIFIED
Efremenko, Dmitrydmitry.efremenko (at) dlr.deUNSPECIFIED
Ridzel, Olga Yu.UNSPECIFIEDUNSPECIFIED
Date:2016
Journal or Publication Title:2016 14th International Baltic Conference on Atomic Layer Deposition (BALD)
Refereed publication:Yes
Open Access:No
Gold Open Access:No
In SCOPUS:No
In ISI Web of Science:No
DOI :10.1109/BALD.2016.7886531
Page Range:pp. 34-37
Publisher:Institute of Electrical and Electronics Engineers (IEEE)
ISBN:978-5-9651-0997-5
Status:Published
Keywords:straight line approximation; electron spectroscopy
Event Title:Atomic Layer Deposition (BALD)
Event Location:St.Petersburg, Russia
Event Type:international Conference
Event Dates:2. - 4. Okt. 2016
Organizer:IEEE Org.
HGF - Research field:Aeronautics, Space and Transport
HGF - Program:Space
HGF - Program Themes:Earth Observation
DLR - Research area:Raumfahrt
DLR - Program:R EO - Erdbeobachtung
DLR - Research theme (Project):R - Vorhaben Spektrometrische Verfahren und Konzepte der Fernerkundung (old)
Location: Oberpfaffenhofen
Institutes and Institutions:Remote Sensing Technology Institute > Atmospheric Processors
Deposited By: Efremenko, Dr Dmitry
Deposited On:19 Apr 2017 10:53
Last Modified:12 May 2017 15:36

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