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Afanas'ev, Victor P. and Gryazev, Alexander S. and Kaplya, Pavel S. and Efremenko, Dmitry and Ridzel, Olga Yu. (2016) Software tools for profile analysis of multi-layered systems by using the Elastic Peak Electron Spectroscopy. In: 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD), pp. 34-37. Institute of Electrical and Electronics Engineers (IEEE). Atomic Layer Deposition (BALD), 2016-10-02 - 2016-10-04, St.Petersburg, Russia. doi: 10.1109/BALD.2016.7886531. ISBN 978-5-9651-0997-5.
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Official URL: http://dx.doi.org/10.1109/BALD.2016.7886531
Abstract
The new generation of spectrometers with high energy resolution can resolve elastic peaks of electrons reflected by atoms in solids. In this regard, there is an increasing interest in the applications of the so-called Elastic Peak Electron Spectroscopy (EPES) for measuring composition-versus-depth profiles since it is non-destructive and sensible to the presence of hydrogen in solids. This study presents numerical tools for quantitative interpretation of the EPES signal. They include modules for peak detecting, estimating the elastic peak intensities and retrieving composition-versus-depth profiles. The latter is based on the transport theory and invokes the straight line approximation (SLA). The examples of profile retrieval using the SLA are given. The accuracy of the proposed model is analyzed. Software Tools for Profile Analysis of Multi-Layered Systems by Using the Elastic Peak Electron Spectroscopy.
| Item URL in elib: | https://elib.dlr.de/111865/ | ||||||||||||||||||||||||
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| Document Type: | Conference or Workshop Item (Speech) | ||||||||||||||||||||||||
| Title: | Software tools for profile analysis of multi-layered systems by using the Elastic Peak Electron Spectroscopy | ||||||||||||||||||||||||
| Authors: |
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| Date: | 2016 | ||||||||||||||||||||||||
| Journal or Publication Title: | 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) | ||||||||||||||||||||||||
| Refereed publication: | Yes | ||||||||||||||||||||||||
| Open Access: | No | ||||||||||||||||||||||||
| Gold Open Access: | No | ||||||||||||||||||||||||
| In SCOPUS: | No | ||||||||||||||||||||||||
| In ISI Web of Science: | No | ||||||||||||||||||||||||
| DOI: | 10.1109/BALD.2016.7886531 | ||||||||||||||||||||||||
| Page Range: | pp. 34-37 | ||||||||||||||||||||||||
| Publisher: | Institute of Electrical and Electronics Engineers (IEEE) | ||||||||||||||||||||||||
| ISBN: | 978-5-9651-0997-5 | ||||||||||||||||||||||||
| Status: | Published | ||||||||||||||||||||||||
| Keywords: | straight line approximation; electron spectroscopy | ||||||||||||||||||||||||
| Event Title: | Atomic Layer Deposition (BALD) | ||||||||||||||||||||||||
| Event Location: | St.Petersburg, Russia | ||||||||||||||||||||||||
| Event Type: | international Conference | ||||||||||||||||||||||||
| Event Start Date: | 2 October 2016 | ||||||||||||||||||||||||
| Event End Date: | 4 October 2016 | ||||||||||||||||||||||||
| Organizer: | IEEE Org. | ||||||||||||||||||||||||
| HGF - Research field: | Aeronautics, Space and Transport | ||||||||||||||||||||||||
| HGF - Program: | Space | ||||||||||||||||||||||||
| HGF - Program Themes: | Earth Observation | ||||||||||||||||||||||||
| DLR - Research area: | Raumfahrt | ||||||||||||||||||||||||
| DLR - Program: | R EO - Earth Observation | ||||||||||||||||||||||||
| DLR - Research theme (Project): | R - Vorhaben Spektrometrische Verfahren und Konzepte der Fernerkundung (old) | ||||||||||||||||||||||||
| Location: | Oberpfaffenhofen | ||||||||||||||||||||||||
| Institutes and Institutions: | Remote Sensing Technology Institute > Atmospheric Processors | ||||||||||||||||||||||||
| Deposited By: | Efremenko, Dr Dmitry | ||||||||||||||||||||||||
| Deposited On: | 19 Apr 2017 10:53 | ||||||||||||||||||||||||
| Last Modified: | 24 Apr 2024 20:16 |
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