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Afanas'ev, Victor P. und Gryazev, Alexander S. und Kaplya, Pavel S. und Efremenko, Dmitry und Ridzel, Olga Yu. (2016) Software tools for profile analysis of multi-layered systems by using the Elastic Peak Electron Spectroscopy. In: 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD), Seiten 34-37. Institute of Electrical and Electronics Engineers (IEEE). Atomic Layer Deposition (BALD), 2. - 4. Okt. 2016, St.Petersburg, Russia. doi: 10.1109/BALD.2016.7886531. ISBN 978-5-9651-0997-5.
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Offizielle URL: http://dx.doi.org/10.1109/BALD.2016.7886531
Kurzfassung
The new generation of spectrometers with high energy resolution can resolve elastic peaks of electrons reflected by atoms in solids. In this regard, there is an increasing interest in the applications of the so-called Elastic Peak Electron Spectroscopy (EPES) for measuring composition-versus-depth profiles since it is non-destructive and sensible to the presence of hydrogen in solids. This study presents numerical tools for quantitative interpretation of the EPES signal. They include modules for peak detecting, estimating the elastic peak intensities and retrieving composition-versus-depth profiles. The latter is based on the transport theory and invokes the straight line approximation (SLA). The examples of profile retrieval using the SLA are given. The accuracy of the proposed model is analyzed. Software Tools for Profile Analysis of Multi-Layered Systems by Using the Elastic Peak Electron Spectroscopy.
| elib-URL des Eintrags: | https://elib.dlr.de/111865/ | ||||||||||||||||||||||||
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| Dokumentart: | Konferenzbeitrag (Vortrag) | ||||||||||||||||||||||||
| Titel: | Software tools for profile analysis of multi-layered systems by using the Elastic Peak Electron Spectroscopy | ||||||||||||||||||||||||
| Autoren: |
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| Datum: | 2016 | ||||||||||||||||||||||||
| Erschienen in: | 2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) | ||||||||||||||||||||||||
| Referierte Publikation: | Ja | ||||||||||||||||||||||||
| Open Access: | Nein | ||||||||||||||||||||||||
| Gold Open Access: | Nein | ||||||||||||||||||||||||
| In SCOPUS: | Nein | ||||||||||||||||||||||||
| In ISI Web of Science: | Nein | ||||||||||||||||||||||||
| DOI: | 10.1109/BALD.2016.7886531 | ||||||||||||||||||||||||
| Seitenbereich: | Seiten 34-37 | ||||||||||||||||||||||||
| Verlag: | Institute of Electrical and Electronics Engineers (IEEE) | ||||||||||||||||||||||||
| ISBN: | 978-5-9651-0997-5 | ||||||||||||||||||||||||
| Status: | veröffentlicht | ||||||||||||||||||||||||
| Stichwörter: | straight line approximation; electron spectroscopy | ||||||||||||||||||||||||
| Veranstaltungstitel: | Atomic Layer Deposition (BALD) | ||||||||||||||||||||||||
| Veranstaltungsort: | St.Petersburg, Russia | ||||||||||||||||||||||||
| Veranstaltungsart: | internationale Konferenz | ||||||||||||||||||||||||
| Veranstaltungsdatum: | 2. - 4. Okt. 2016 | ||||||||||||||||||||||||
| Veranstalter : | IEEE Org. | ||||||||||||||||||||||||
| HGF - Forschungsbereich: | Luftfahrt, Raumfahrt und Verkehr | ||||||||||||||||||||||||
| HGF - Programm: | Raumfahrt | ||||||||||||||||||||||||
| HGF - Programmthema: | Erdbeobachtung | ||||||||||||||||||||||||
| DLR - Schwerpunkt: | Raumfahrt | ||||||||||||||||||||||||
| DLR - Forschungsgebiet: | R EO - Erdbeobachtung | ||||||||||||||||||||||||
| DLR - Teilgebiet (Projekt, Vorhaben): | R - Vorhaben Spektrometrische Verfahren und Konzepte der Fernerkundung (alt) | ||||||||||||||||||||||||
| Standort: | Oberpfaffenhofen | ||||||||||||||||||||||||
| Institute & Einrichtungen: | Institut für Methodik der Fernerkundung > Atmosphärenprozessoren | ||||||||||||||||||||||||
| Hinterlegt von: | Efremenko, Dr Dmitry | ||||||||||||||||||||||||
| Hinterlegt am: | 19 Apr 2017 10:53 | ||||||||||||||||||||||||
| Letzte Änderung: | 12 Mai 2017 15:36 |
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