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Roughness measurement on supersmooth surfaces with an Optical Heterodyne Profiler.
Schmitt, D.-R. and Ringel, G. and Kratz, F. (1995) Roughness measurement on supersmooth surfaces with an Optical Heterodyne Profiler. In: Proc. 8th International Precision Engineering, 15-19 May 1995. 8th International Precision Engineering, Compiegne, Frankreich, 15.-19.05.1995.
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| Document Type: | Conference or Workshop Item (Paper) | ||||||||
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| Additional Information: | LIDO-Berichtsjahr=1995, | ||||||||
| Title: | Roughness measurement on supersmooth surfaces with an Optical Heterodyne Profiler. | ||||||||
| Authors: |
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| Date: | 1995 | ||||||||
| Journal or Publication Title: | Proc. 8th International Precision Engineering, 15-19 May 1995 | ||||||||
| Status: | Published | ||||||||
| Event Title: | 8th International Precision Engineering, Compiegne, Frankreich, 15.-19.05.1995 | ||||||||
| HGF - Research field: | UNSPECIFIED | ||||||||
| HGF - Program: | no assignment | ||||||||
| HGF - Program Themes: | no assignment | ||||||||
| DLR - Research area: | UNSPECIFIED | ||||||||
| DLR - Program: | no assignment | ||||||||
| DLR - Research theme (Project): | ["eprint_fieldopt_dlr_project_search_L000" not defined] | ||||||||
| Location: | Braunschweig | ||||||||
| Institutes and Institutions: | Institute of Flight Control | ||||||||
| Deposited By: | elib DLR-Beauftragter | ||||||||
| Deposited On: | 02 Apr 2006 | ||||||||
| Last Modified: | 27 Apr 2009 07:20 |
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