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Micromachining with Ultrashort Laser Pulses
Zhao, J.-X. and Hüttner, B. and Menschig, A. (1999) Micromachining with Ultrashort Laser Pulses. In: Laser Applications in Microelectronic and Optroelectronic Manufacturing IV, Vol. 3618, pp. 114-121. SPIE Bellingham, WA, USA. Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, San Jose, CA, USA, Jan 25-27, 1999. ISBN 0-8194-3088-9.
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| Document Type: | Conference or Workshop Item (Paper) | ||||||||||
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| Additional Information: | LIDO-Berichtsjahr=1999, | ||||||||||
| Title: | Micromachining with Ultrashort Laser Pulses | ||||||||||
| Authors: |
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| Date: | 1999 | ||||||||||
| Journal or Publication Title: | Laser Applications in Microelectronic and Optroelectronic Manufacturing IV | ||||||||||
| Volume: | Vol. 3618 | ||||||||||
| Page Range: | pp. 114-121 | ||||||||||
| Editors: |
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| Publisher: | SPIE Bellingham, WA, USA | ||||||||||
| ISBN: | 0-8194-3088-9 | ||||||||||
| Status: | Published | ||||||||||
| Keywords: | Femtosecond laser, materials processing | ||||||||||
| Event Title: | Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, San Jose, CA, USA, Jan 25-27, 1999 | ||||||||||
| Organizer: | SPIE | ||||||||||
| HGF - Research field: | Energy | ||||||||||
| HGF - Program: | Aeronautics | ||||||||||
| HGF - Program Themes: | L - no assignement | ||||||||||
| DLR - Research area: | Energy | ||||||||||
| DLR - Program: | L - no assignement | ||||||||||
| DLR - Research theme (Project): | L - Laser Research and Technology | ||||||||||
| Location: | Stuttgart | ||||||||||
| Institutes and Institutions: | Institute of Technical Physics | ||||||||||
| Deposited By: | elib DLR-Beauftragter | ||||||||||
| Deposited On: | 16 Sep 2005 | ||||||||||
| Last Modified: | 06 Jan 2010 14:37 |
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