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Micromachining with Ultrashort Laser Pulses

Zhao, J.-X. and Hüttner, B. and Menschig, A. (1999) Micromachining with Ultrashort Laser Pulses. In: Laser Applications in Microelectronic and Optroelectronic Manufacturing IV, Vol. 3618, pp. 114-121. SPIE Bellingham, WA, USA. Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, San Jose, CA, USA, Jan 25-27, 1999. ISBN 0-8194-3088-9.

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Document Type:Conference or Workshop Item (Paper)
Additional Information: LIDO-Berichtsjahr=1999,
Title:Micromachining with Ultrashort Laser Pulses
Authors:
AuthorsInstitution or Email of Authors
Zhao, J.-X.UNSPECIFIED
Hüttner, B.UNSPECIFIED
Menschig, A.UNSPECIFIED
Date:1999
Journal or Publication Title:Laser Applications in Microelectronic and Optroelectronic Manufacturing IV
Volume:Vol. 3618
Page Range:pp. 114-121
Editors:
EditorsEmail
Dubowski, J.J.UNSPECIFIED
Helvajian, H.UNSPECIFIED
Kreutz, E.W.UNSPECIFIED
Sugioka, K.UNSPECIFIED
Publisher:SPIE Bellingham, WA, USA
ISBN:0-8194-3088-9
Status:Published
Keywords:Femtosecond laser, materials processing
Event Title:Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, San Jose, CA, USA, Jan 25-27, 1999
Organizer:SPIE
HGF - Research field:Energy
HGF - Program:Aeronautics
HGF - Program Themes:other
DLR - Research area:Energy
DLR - Program:L - no assignement
DLR - Research theme (Project):L - Laser Research and Technology
Location: Stuttgart
Institutes and Institutions:Institute of Technical Physics
Deposited By: elib DLR-Beauftragter
Deposited On:16 Sep 2005
Last Modified:06 Jan 2010 14:37

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