Beutel, T. und Leester-Schädel, M. und Wierach, Peter und Sinapius, Michael und Büttgenbach, S. (2010) Novel Pressure Sensor for Aerospace Purposes. Sensors and Transducers, Vol. 115 (Issue 4), Seiten 11-19. International Frequency Sensor Association (IFSA). ISSN 1726-5479.
Dieses Archiv kann nicht den Volltext zur Verfügung stellen.
Kurzfassung
In this work, a novel silicon-based sensor for pressure and flow measurements is presented. To meet the special requirements of the aerospace industry a new piezoresistive pressure sensor with a flat surface has been developed, so that the flow is not affected by the sensor. To avoid bonding-wires on top of the sensor a special through-wafer connection is presented. By making other significant changes in the layout as well as in the micro fabrication process, a novel sensor has been created. It is robust enough to be laminated in fibre material, which opens new possibilities for measurements. With this sensor it is possible to characterize the condition of the flow near the separation point. This article describes the complete process from the development to the laminated sensor.
elib-URL des Eintrags: | https://elib.dlr.de/75347/ | ||||||||||||||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Dokumentart: | Zeitschriftenbeitrag | ||||||||||||||||||||||||
Titel: | Novel Pressure Sensor for Aerospace Purposes | ||||||||||||||||||||||||
Autoren: |
| ||||||||||||||||||||||||
Datum: | April 2010 | ||||||||||||||||||||||||
Erschienen in: | Sensors and Transducers | ||||||||||||||||||||||||
Referierte Publikation: | Ja | ||||||||||||||||||||||||
Open Access: | Nein | ||||||||||||||||||||||||
Gold Open Access: | Nein | ||||||||||||||||||||||||
In SCOPUS: | Nein | ||||||||||||||||||||||||
In ISI Web of Science: | Nein | ||||||||||||||||||||||||
Band: | Vol. 115 | ||||||||||||||||||||||||
Seitenbereich: | Seiten 11-19 | ||||||||||||||||||||||||
Verlag: | International Frequency Sensor Association (IFSA) | ||||||||||||||||||||||||
ISSN: | 1726-5479 | ||||||||||||||||||||||||
Status: | veröffentlicht | ||||||||||||||||||||||||
Stichwörter: | Piezoresistive pressure sensor for flow characterization, Silicon membrane, Micro fabrication, Through-wafer connection | ||||||||||||||||||||||||
HGF - Forschungsbereich: | Luftfahrt, Raumfahrt und Verkehr | ||||||||||||||||||||||||
HGF - Programm: | Luftfahrt | ||||||||||||||||||||||||
HGF - Programmthema: | Drehflügler (alt) | ||||||||||||||||||||||||
DLR - Schwerpunkt: | Luftfahrt | ||||||||||||||||||||||||
DLR - Forschungsgebiet: | L RR - Drehflüglerforschung | ||||||||||||||||||||||||
DLR - Teilgebiet (Projekt, Vorhaben): | L - Der aktive Drehflügler (alt) | ||||||||||||||||||||||||
Standort: | Braunschweig | ||||||||||||||||||||||||
Institute & Einrichtungen: | Institut für Faserverbundleichtbau und Adaptronik | ||||||||||||||||||||||||
Hinterlegt von: | Böhringer-Thelen, Isolde | ||||||||||||||||||||||||
Hinterlegt am: | 28 Mär 2012 08:38 | ||||||||||||||||||||||||
Letzte Änderung: | 18 Okt 2023 12:38 |
Nur für Mitarbeiter des Archivs: Kontrollseite des Eintrags