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Il'in, Konstantin und Stockhausen, Axel und Neuhaus, Manfred und Wermund, Hans-Jürgen und Siegel, Michael und Semenov, Alexey und Hübers, Heinz-Wilhelm (2006) NbN ultra-thin film Hot-Electron Detector for THZ application: Fabrication issues. Kryoelektronische Bauelemente (Kryo 2006), 2006-10-03 - 2006-10-05, Ilmenau (BRD).
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Kurzfassung
Superconducting Hot-Electron Detector (HED) is one of promising devices for a wide range of THz applications: astronomy, spectroscopy, imaging, and security. Actually HED is a rectangular strip of superconducting thin film embedded into antenna structure. We have developed thin film technology for fabrication of HED based on ultra-thin NbN films. The NbN ultra-thin film with a thickness of about 4 – 5 nm and T<sub>c</sub> about 10 K are fabricated by reactive magnetron sputtering from a Nb target in argon + nitrogen atmosphere onto heated sapphire or Si substrates. The antenna structure of the device is patterned by a two-steps electron-beam lithography and lift-off process of deposited Ti(Nb,NbN)/Au/Ti(Nb) tri-layers with a total thickness about 300 nm. Finally, a 200 – 300 nm long NbN bridge embedded into a log-period antenna structure is formed by electron-beam lithography and ion milling.
| elib-URL des Eintrags: | https://elib.dlr.de/45134/ | ||||||||||||||||||||||||||||||||
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| Dokumentart: | Konferenzbeitrag (Poster) | ||||||||||||||||||||||||||||||||
| Titel: | NbN ultra-thin film Hot-Electron Detector for THZ application: Fabrication issues | ||||||||||||||||||||||||||||||||
| Autoren: |
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| Datum: | Oktober 2006 | ||||||||||||||||||||||||||||||||
| Open Access: | Nein | ||||||||||||||||||||||||||||||||
| Gold Open Access: | Nein | ||||||||||||||||||||||||||||||||
| In SCOPUS: | Nein | ||||||||||||||||||||||||||||||||
| In ISI Web of Science: | Nein | ||||||||||||||||||||||||||||||||
| Status: | veröffentlicht | ||||||||||||||||||||||||||||||||
| Stichwörter: | hot-electron detector, thin film fabrication | ||||||||||||||||||||||||||||||||
| Veranstaltungstitel: | Kryoelektronische Bauelemente (Kryo 2006) | ||||||||||||||||||||||||||||||||
| Veranstaltungsort: | Ilmenau (BRD) | ||||||||||||||||||||||||||||||||
| Veranstaltungsart: | internationale Konferenz | ||||||||||||||||||||||||||||||||
| Veranstaltungsbeginn: | 3 Oktober 2006 | ||||||||||||||||||||||||||||||||
| Veranstaltungsende: | 5 Oktober 2006 | ||||||||||||||||||||||||||||||||
| Veranstalter : | Institut für physikalische Hochtechnologie e. V. Jena | ||||||||||||||||||||||||||||||||
| HGF - Forschungsbereich: | Verkehr und Weltraum (alt) | ||||||||||||||||||||||||||||||||
| HGF - Programm: | Weltraum (alt) | ||||||||||||||||||||||||||||||||
| HGF - Programmthema: | W - keine Zuordnung | ||||||||||||||||||||||||||||||||
| DLR - Schwerpunkt: | Weltraum | ||||||||||||||||||||||||||||||||
| DLR - Forschungsgebiet: | W - keine Zuordnung | ||||||||||||||||||||||||||||||||
| DLR - Teilgebiet (Projekt, Vorhaben): | W - keine Zuordnung (alt) | ||||||||||||||||||||||||||||||||
| Standort: | Berlin-Adlershof | ||||||||||||||||||||||||||||||||
| Institute & Einrichtungen: | Institut für Planetenforschung > Terahertz- und Infrarotsensorik | ||||||||||||||||||||||||||||||||
| Hinterlegt von: | Haas, Dr. Philipp Moritz | ||||||||||||||||||||||||||||||||
| Hinterlegt am: | 25 Okt 2006 | ||||||||||||||||||||||||||||||||
| Letzte Änderung: | 24 Apr 2024 19:07 |
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