Hüttner, Bernd (2004) Fs-laser pulse damage of semiconductors. In: Proceedings of SPIE, 5448, Seiten 928-934. SPIE. High Power Laser Ablation V, 2004-04-25 - 2004-04-30, Taos, NM (USA). ISBN 0-8194-5371-4. ISSN 0277-786X.
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Kurzfassung
We begin with a brief critical discussion of the existing definitions of melting and damage thresholds and the different kinds of experimental determinations of the thresholds. Then we investigate the thermal and athermal melting of a wide-band gap semiconductor (SiO2) and of silicon by two different methods consisting of a rate equation for the excited electrons and of a complete self-consistent solution of a coupled system of differential equations for the electron density and for the electron and phonon temperatures. In par-ticular, we focus on the role of the critical electron density in the case of athermal melting. Our calculations suggest that this is determined by the critical plasma density. Finally, we conclude with a discussion of the benefits and drawbacks of the two approaches.
elib-URL des Eintrags: | https://elib.dlr.de/22149/ | ||||||||
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Dokumentart: | Konferenzbeitrag (Paper, Poster) | ||||||||
Titel: | Fs-laser pulse damage of semiconductors | ||||||||
Autoren: |
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Datum: | 2004 | ||||||||
Erschienen in: | Proceedings of SPIE | ||||||||
Referierte Publikation: | Ja | ||||||||
Open Access: | Ja | ||||||||
Gold Open Access: | Nein | ||||||||
In SCOPUS: | Nein | ||||||||
In ISI Web of Science: | Nein | ||||||||
Band: | 5448 | ||||||||
Seitenbereich: | Seiten 928-934 | ||||||||
Verlag: | SPIE | ||||||||
Name der Reihe: | High-Power Laser Ablation | ||||||||
ISSN: | 0277-786X | ||||||||
ISBN: | 0-8194-5371-4 | ||||||||
Status: | veröffentlicht | ||||||||
Stichwörter: | melting threshold, semiconductor, laser pulse duration, fs-range, critical density | ||||||||
Veranstaltungstitel: | High Power Laser Ablation V | ||||||||
Veranstaltungsort: | Taos, NM (USA) | ||||||||
Veranstaltungsart: | internationale Konferenz | ||||||||
Veranstaltungsbeginn: | 25 April 2004 | ||||||||
Veranstaltungsende: | 30 April 2004 | ||||||||
HGF - Forschungsbereich: | Luftfahrt, Raumfahrt und Verkehr | ||||||||
HGF - Programm: | Luftfahrt | ||||||||
HGF - Programmthema: | Starrflügler (alt) | ||||||||
DLR - Schwerpunkt: | Luftfahrt | ||||||||
DLR - Forschungsgebiet: | L AR - Starrflüglerforschung | ||||||||
DLR - Teilgebiet (Projekt, Vorhaben): | L - Laserforschung und -technologie (alt) | ||||||||
Standort: | Stuttgart | ||||||||
Institute & Einrichtungen: | Institut für Technische Physik | ||||||||
Hinterlegt von: | Hüttner, Dr.rer.nat. Bernd | ||||||||
Hinterlegt am: | 09 Feb 2006 | ||||||||
Letzte Änderung: | 24 Apr 2024 19:03 |
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