MEMS Based Fabry-Perot Interferometers for In-Situ Material Characterization

Kurzfassung

We have developed a first prototype of a MEMS based Fabry-Perot interferometer using theromopile (single pixel) detectors. The instrument is based on flight-heritage radiometer technology as flown on, e.g., the Rosetta Lander, the Hayabusa2 MASCOT lander, and the Insight Mars lander. Sensors including thermopile detectors and a Fabry-Perot MEMS interferometer that is tunable in the 8 to 11 µm wavelength range have been integrated into standard transis tor outline (TO) hermetic packages with a diameter of 15 mm and a height of 5 mm. Sensor housings have an aperture of 3 mm, the field of view of the sensor assembly is 20° full-width half-maximum, and the necessary control voltages for tuning the central wavelength is between 0 and 70 V. For flexibility, the order selection optical filter is currently external in our setup, but can later be integrated into the TO housing.