Textured dense zinc oxide layers for active noise cancelling windows

Kurzfassung

Dense ZnO films with a strong c-axis texture have been deposited on TCO-Glass, Glass and Si wafers, respectively, with a two-step pressureless wet chemical method using zinc Acetatedihydrate as Zn-precursor. The crystallographic structure of the films has been studied with XRD and SEM. Optical measurements reveal a high transparency of the ZnO films with a thickness of up to 10 µm. This new cost effective route for ZnO film deposition does not require expensive sophisticated equipment and is easily upscaled.