Moment fluid equations for ions in weakly-ionized plasma

Kurzfassung

A new one-dimensional fluid model for ions in weakly-ionized plasma is proposed. The model differs from the existing ones in two aspects. First, a more accurate approximation of the collision terms in the fluid equations is suggested. For this purpose, the results obtained using the Monte-Carlo kinetic model of the ion swarm experiments are considered. Second, the ion energy equation is taken into account. The fluid equations are closed using a simple model of the ion velocity distribution function. The accuracy of the fluid model is examined by comparing with the results of particle-in-cell/Monte Carlo simulations. In particular, several test problems are considered using a parallel plate model of the capacitively coupled radio-frequency discharge. It is shown that the results obtained using the proposed fluid model are in good agreement with those obtained from the simulations over a wide range of discharge conditions. An approximation of the ion velocity distribution function for the problem under consideration is also discussed.