Sample praparation for synchrotron ptychography measurements by Focussed Ion Beam (FIB)

Kurzfassung

Ptychography is a scanning transmission X-ray microscopy using a coherent X-ray beam. The fine focused beam generates a driffraction pattern at each point. From the entity of these pictures a three-dimensional image of the sample with a resolution down to 20nm can be reconstructed via Radon and iterative Fourier re-transform calculations. During the analyses, the sample rotates about its own axis. Therefore, the sample should be rotation-symmetric. A small cone-shaped Sample was prepared out of a microsection of a selected laser melted titanium alloy by Dual-Beam FIB (FEI Helios 600i). We describe the preparation procedures, which resulted in samples of good quality, suited well for the pytchography technique.