Il’in, K. and Rall, D. and Hofherr, M. and Siegel, M. and Semenov, A. D. and Hübers, H.-W. and Engel, A. and Schilling, A. (2010) TaN thin films for Superconducting Nanowire Single-Photon Detectors. In: Tagungsband, p. 51. DLR. Kryo 2010, 03.-05.10.2010, Zeuthen, Brandenburg.
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Development of superconducting nanowire single-photon detectors (SNSPD) with a higher intrinsic detection efficiency, stronger absorption in a wider spectral range stimulates a study of thin films of different superconducting materials. The tantalum nitride TaN thin films are typically used as an insulator in multi-layer system for SIS device fabrication  or as cover layer to improve the hardness and chemical stability of any surfaces. At the same time there are only few and sometimes contradictory publications about superconductivity in thin films of TaN [1, 2]. We present results on fabrication and characterization of TaN thin films with a focus on their application in development of SNSPD devices.
|Document Type:||Conference or Workshop Item (Poster)|
|Title:||TaN thin films for Superconducting Nanowire Single-Photon Detectors|
|Journal or Publication Title:||Tagungsband|
|Page Range:||p. 51|
|Keywords:||TaN thin films for Superconducting Nanowire Single-Photon Detectors, higher intrinsic detection efficiency, wider spectral range, SNSPD devices|
|Event Title:||Kryo 2010|
|Event Location:||Zeuthen, Brandenburg|
|Event Type:||national Conference|
|Organizer:||DLR, Prof. Hübers|
|HGF - Research field:||Aeronautics, Space and Transport (old)|
|HGF - Program:||Transport|
|HGF - Program Themes:||Traffic Management|
|DLR - Research area:||Transport|
|DLR - Program:||V VM - Verkehrsmanagement|
|DLR - Research theme (Project):||V - FAMOUS (old)|
|Institutes and Institutions:||Institute of Planetary Research > Terahertz and Infrared Sensors|
|Deposited By:||Ulrike Stiebeler|
|Deposited On:||04 Jan 2011 17:32|
|Last Modified:||04 Jan 2011 17:32|
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