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TaN thin films for Superconducting Nanowire Single-Photon Detectors

Il’in, K. and Rall, D. and Hofherr, M. and Siegel, M. and Semenov, A. D. and Hübers, H.-W. and Engel, A. and Schilling, A. (2010) TaN thin films for Superconducting Nanowire Single-Photon Detectors. In: Tagungsband, p. 51. DLR. Kryo 2010, 03.-05.10.2010, Zeuthen, Brandenburg.

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Abstract

Development of superconducting nanowire single-photon detectors (SNSPD) with a higher intrinsic detection efficiency, stronger absorption in a wider spectral range stimulates a study of thin films of different superconducting materials. The tantalum nitride TaN thin films are typically used as an insulator in multi-layer system for SIS device fabrication [1] or as cover layer to improve the hardness and chemical stability of any surfaces. At the same time there are only few and sometimes contradictory publications about superconductivity in thin films of TaN [1, 2]. We present results on fabrication and characterization of TaN thin films with a focus on their application in development of SNSPD devices.

Document Type:Conference or Workshop Item (Poster)
Title:TaN thin films for Superconducting Nanowire Single-Photon Detectors
Authors:
AuthorsInstitution or Email of Authors
Il’in, K.Institut für Mikro- und Nanoelektronische Systeme, Karlsruher Institut für Technologie, Hertzstr. 16, 76187 Karlsruhe,
Rall, D.Institut für Mikro- und Nanoelektronische Systeme, Karlsruher Institut für Technologie, Hertzstr. 16, 76187 Karlsruhe,
Hofherr, M.Institut für Mikro- und Nanoelektronische Systeme, Karlsruher Institut für Technologie, Hertzstr. 16, 76187 Karlsruhe,
Siegel, M.Institut für Mikro- und Nanoelektronische Systeme, Karlsruher Institut für Technologie, Hertzstr. 16, 76187 Karlsruhe,
Semenov, A. D.Alexei.Semenov@dlr.de
Hübers, H.-W.heinz-wilhelm.huebers@dlr.de
Engel, A.Physik-Institut der Universität Zürich Winterthurerstrasse 190 8057 Zürich, Schweiz
Schilling, A.Physik-Institut der Universität Zürich Winterthurerstrasse 190 8057 Zürich, Schweiz
Date:October 2010
Journal or Publication Title:Tagungsband
Page Range:p. 51
Publisher:DLR
Status:Published
Keywords:TaN thin films for Superconducting Nanowire Single-Photon Detectors, higher intrinsic detection efficiency, wider spectral range, SNSPD devices
Event Title:Kryo 2010
Event Location:Zeuthen, Brandenburg
Event Type:national Conference
Event Dates:03.-05.10.2010
Organizer:DLR, Prof. Hübers
HGF - Research field:Aeronautics, Space and Transport (old)
HGF - Program:Transport
HGF - Program Themes:Traffic Management
DLR - Research area:Transport
DLR - Program:V VM - Verkehrsmanagement
DLR - Research theme (Project):V - FAMOUS (old)
Location: Berlin-Adlershof
Institutes and Institutions:Institute of Planetary Research > Terahertz and Infrared Sensors
Deposited By: Ulrike Stiebeler
Deposited On:04 Jan 2011 17:32
Last Modified:04 Jan 2011 17:32

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