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Ultra-thin NbN films on Si: crystalline and superconducting properties

Ilin, Konstantin and Schneider, R and Gerthsen, D and Engel, Andreas and Bartolf, Holger and Schilling, Andreas and Semenov, Alexei and Hübers, Heinz-Wilhelm and Freitag, B and Siegel, Michael (2008) Ultra-thin NbN films on Si: crystalline and superconducting properties. In: Journal of Physics: Conference Series, 97. IOP Publishing. 8th European Conference on Applied Superconductivity (EUCAS 2007), 2007-09-16 - 2007-09-20, Brussels (Belgium).

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Official URL: http://www.iop.org/EJ/article/1742-6596/97/1/012045/jpconf8_97_012045.pdf?request-id=d459f6f4-6a79-4bbc-bd18-c35ca482111a

Abstract

We present results on superconducting and crystalline properties of NbN films with a thickness smaller than 10 nm. The films were deposited using reactive magnetron sputtering on heated silicon substrates. Zero resistance critical temperatures of about 9 K have been measured for films with a thickness of about 5 nm and reaches values ≈12 K for 10 nm thick films. A value of the superconducting coherence length of about 4 nm was estimated from the measurements of the second critical magnetic field. High-resolution transmission electron microscopy accompanied with electron-spectroscopy techniques was used to analyze the structure, thickness, and film-substrate interface of fabricated films. The interrelations between fabrication conditions, superconducting and crystalline properties of NbN films on Si substrates are presented and discussed.

Document Type:Conference or Workshop Item (UNSPECIFIED)
Additional Information:doi:10.1088/1742-6596/97/1/012045
Title:Ultra-thin NbN films on Si: crystalline and superconducting properties
Authors:
AuthorsInstitution or Email of Authors
Ilin, KonstantinUniversity of Karlsruhe
Schneider, RUniversity of Karlsruhe
Gerthsen, DUniversity of Karlsruhe
Engel, AndreasUniversity of Zürich
Bartolf, HolgerUniversity of Zürich
Schilling, AndreasUniversity of Zürich
Semenov, AlexeiUNSPECIFIED
Hübers, Heinz-WilhelmUNSPECIFIED
Freitag, BFEI Company BV, Eindhoven, The Netherlands
Siegel, MichaelUniversity of Karlsruhe
Date:March 2008
Journal or Publication Title:Journal of Physics: Conference Series
Refereed publication:No
In SCOPUS:No
In ISI Web of Science:No
Volume:97
Number of Pages:6
Publisher:IOP Publishing
Status:Published
Keywords:ultra-thin films, superconductivity
Event Title:8th European Conference on Applied Superconductivity (EUCAS 2007)
Event Location:Brussels (Belgium)
Event Type:international Conference
Event Dates:2007-09-16 - 2007-09-20
HGF - Research field:Aeronautics, Space and Transport (old)
HGF - Program:Space (old)
HGF - Program Themes:W EW - Erforschung des Weltraums
DLR - Research area:Space
DLR - Program:W EW - Erforschung des Weltraums
DLR - Research theme (Project):W - Vorhaben IR-Astronomie (old)
Location: Berlin-Adlershof
Institutes and Institutions:Institute of Planetary Research > Terahertz and Infrared Sensors
Deposited By: Prof.Dr. Alexey Semenov
Deposited On:05 Jan 2009
Last Modified:17 Mar 2010 11:41

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