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NbN ultra-thin film Hot-Electron Detector for THZ application: Fabrication issues
Il'in, Konstantin and Stockhausen, Axel and Neuhaus, Manfred and Wermund, Hans-Jürgen and Siegel, Michael and Semenov, Alexey and Hübers, Heinz-Wilhelm (2006) NbN ultra-thin film Hot-Electron Detector for THZ application: Fabrication issues. Kryoelektronische Bauelemente (Kryo 2006), 2006-10-03 - 2006-10-05, Ilmenau (BRD).
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Abstract
Superconducting Hot-Electron Detector (HED) is one of promising devices for a wide range of THz applications: astronomy, spectroscopy, imaging, and security. Actually HED is a rectangular strip of superconducting thin film embedded into antenna structure. We have developed thin film technology for fabrication of HED based on ultra-thin NbN films. The NbN ultra-thin film with a thickness of about 4 – 5 nm and T<sub>c</sub> about 10 K are fabricated by reactive magnetron sputtering from a Nb target in argon + nitrogen atmosphere onto heated sapphire or Si substrates. The antenna structure of the device is patterned by a two-steps electron-beam lithography and lift-off process of deposited Ti(Nb,NbN)/Au/Ti(Nb) tri-layers with a total thickness about 300 nm. Finally, a 200 – 300 nm long NbN bridge embedded into a log-period antenna structure is formed by electron-beam lithography and ion milling.
| Document Type: | Conference or Workshop Item (Poster) | ||||||||||||||||
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| Title: | NbN ultra-thin film Hot-Electron Detector for THZ application: Fabrication issues | ||||||||||||||||
| Authors: |
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| Date: | October 2006 | ||||||||||||||||
| Status: | Published | ||||||||||||||||
| Keywords: | hot-electron detector, thin film fabrication | ||||||||||||||||
| Event Title: | Kryoelektronische Bauelemente (Kryo 2006) | ||||||||||||||||
| Event Location: | Ilmenau (BRD) | ||||||||||||||||
| Event Type: | international Conference | ||||||||||||||||
| Event Dates: | 2006-10-03 - 2006-10-05 | ||||||||||||||||
| Organizer: | Institut für physikalische Hochtechnologie e. V. Jena | ||||||||||||||||
| HGF - Research field: | Aeronautics, Space and Transport | ||||||||||||||||
| HGF - Program: | Space | ||||||||||||||||
| HGF - Program Themes: | W - no assignement | ||||||||||||||||
| DLR - Research area: | Space | ||||||||||||||||
| DLR - Program: | W - no assignement | ||||||||||||||||
| DLR - Research theme (Project): | W -- no assignement (old) | ||||||||||||||||
| Location: | Berlin-Adlershof | ||||||||||||||||
| Institutes and Institutions: | Institute of Planetary Research > Terahertz and Infrared Sensors | ||||||||||||||||
| Deposited By: | Dr. Philipp Moritz Haas | ||||||||||||||||
| Deposited On: | 25 Oct 2006 | ||||||||||||||||
| Last Modified: | 27 Apr 2009 13:11 |
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