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NbN ultra-thin film Hot-Electron Detector for THZ application: Fabrication issues

Il'in, Konstantin and Stockhausen, Axel and Neuhaus, Manfred and Wermund, Hans-Jürgen and Siegel, Michael and Semenov, Alexey and Hübers, Heinz-Wilhelm (2006) NbN ultra-thin film Hot-Electron Detector for THZ application: Fabrication issues. Kryoelektronische Bauelemente (Kryo 2006), 2006-10-03 - 2006-10-05, Ilmenau (BRD).

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Abstract

Superconducting Hot-Electron Detector (HED) is one of promising devices for a wide range of THz applications: astronomy, spectroscopy, imaging, and security. Actually HED is a rectangular strip of superconducting thin film embedded into antenna structure. We have developed thin film technology for fabrication of HED based on ultra-thin NbN films. The NbN ultra-thin film with a thickness of about 4 – 5 nm and T<sub>c</sub> about 10 K are fabricated by reactive magnetron sputtering from a Nb target in argon + nitrogen atmosphere onto heated sapphire or Si substrates. The antenna structure of the device is patterned by a two-steps electron-beam lithography and lift-off process of deposited Ti(Nb,NbN)/Au/Ti(Nb) tri-layers with a total thickness about 300 nm. Finally, a 200 – 300 nm long NbN bridge embedded into a log-period antenna structure is formed by electron-beam lithography and ion milling.

Document Type:Conference or Workshop Item (Poster)
Title:NbN ultra-thin film Hot-Electron Detector for THZ application: Fabrication issues
Authors:
AuthorsInstitution or Email of Authors
Il'in, KonstantinUniversität Karlsruhe
Stockhausen, AxelUniversität Karlsruhe
Neuhaus, ManfredUniversität Karlsruhe
Wermund, Hans-JürgenUniversität Karlsruhe
Siegel, MichaelUniversität Karlsruhe
Semenov, AlexeyUNSPECIFIED
Hübers, Heinz-WilhelmUNSPECIFIED
Date:October 2006
Status:Published
Keywords:hot-electron detector, thin film fabrication
Event Title:Kryoelektronische Bauelemente (Kryo 2006)
Event Location:Ilmenau (BRD)
Event Type:international Conference
Event Dates:2006-10-03 - 2006-10-05
Organizer:Institut für physikalische Hochtechnologie e. V. Jena
HGF - Research field:Aeronautics, Space and Transport (old)
HGF - Program:Space (old)
HGF - Program Themes:W - no assignement
DLR - Research area:Space
DLR - Program:W - no assignement
DLR - Research theme (Project):W -- no assignement (old)
Location: Berlin-Adlershof
Institutes and Institutions:Institute of Planetary Research > Terahertz and Infrared Sensors
Deposited By: Dr. Philipp Moritz Haas
Deposited On:25 Oct 2006
Last Modified:27 Apr 2009 13:11

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