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Roughness measurement on supersmooth surfaces with an optical Heterodyne Profiler

Schmitt, D.-R. and Ringel, G. and Kratz, F. (1993) Roughness measurement on supersmooth surfaces with an optical Heterodyne Profiler. In: Interferometry VI: Applications. SPIE 2004, San Diego, 11.-16.July 1993.

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Document Type:Conference or Workshop Item (Paper)
Additional Information: LIDO-Berichtsjahr=1993,
Title:Roughness measurement on supersmooth surfaces with an optical Heterodyne Profiler
Authors:
AuthorsInstitution or Email of Authors
Schmitt, D.-R.
Ringel, G.
Kratz, F.
Date:1993
Journal or Publication Title:Interferometry VI: Applications
Status:Published
Event Title:SPIE 2004, San Diego, 11.-16.July 1993
Organizer:SPIE
HGF - Research field:Aeronautics, Space and Transport
HGF - Program:no assignment
HGF - Program Themes:no assignment
DLR - Research area:Aeronautics
DLR - Program:no assignment
DLR - Research theme (Project):["eprint_fieldopt_dlr_project_search_L000" not defined]
Location: Braunschweig
Institutes and Institutions:Institute of Flight Control
Deposited By:elib DLR-Beauftragter
Deposited On:02 Apr 2006
Last Modified:27 Apr 2009 07:15

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