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Roughness measurement on supersmooth surfaces with an optical Heterodyne Profiler

Schmitt, D.-R. and Ringel, G. and Kratz, F. (1993) Roughness measurement on supersmooth surfaces with an optical Heterodyne Profiler. In: Interferometry VI: Applications. SPIE 2004, San Diego, 11.-16.July 1993.

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Document Type:Conference or Workshop Item (Paper)
Additional Information: LIDO-Berichtsjahr=1993,
Title:Roughness measurement on supersmooth surfaces with an optical Heterodyne Profiler
Authors:
AuthorsInstitution or Email of Authors
Schmitt, D.-R.UNSPECIFIED
Ringel, G.UNSPECIFIED
Kratz, F.UNSPECIFIED
Date:1993
Journal or Publication Title:Interferometry VI: Applications
Status:Published
Event Title:SPIE 2004, San Diego, 11.-16.July 1993
Organizer:SPIE
HGF - Research field:Aeronautics, Space and Transport (old)
HGF - Program:other
HGF - Program Themes:other
DLR - Research area:Aeronautics
DLR - Program:no assignment
DLR - Research theme (Project):L -- no assignement
Location: Braunschweig
Institutes and Institutions:Institute of Flight Control
Deposited By: elib DLR-Beauftragter
Deposited On:02 Apr 2006
Last Modified:27 Apr 2009 07:15

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