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Characterization of Supersmooth Surfaces with Roughness below 0.1 mm.

Schmitt, D.-R. (1990) Characterization of Supersmooth Surfaces with Roughness below 0.1 mm. Micro System Technologies (1990), 190-.

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Document Type:Article
Additional Information: LIDO-Berichtsjahr=1990, pages=1,
Title:Characterization of Supersmooth Surfaces with Roughness below 0.1 mm.
Authors:
AuthorsInstitution or Email of Authors
Schmitt, D.-R.UNSPECIFIED
Date:1990
Journal or Publication Title:Micro System Technologies (1990)
Refereed publication:Yes
In ISI Web of Science:Yes
Page Range:190-
Status:Published
HGF - Research field:UNSPECIFIED
HGF - Program:other
HGF - Program Themes:other
DLR - Research area:UNSPECIFIED
DLR - Program:no assignment
DLR - Research theme (Project):L -- no assignement
Location: Braunschweig
Institutes and Institutions:Institute of Flight Control
Deposited By: elib DLR-Beauftragter
Deposited On:02 Apr 2006
Last Modified:27 Apr 2009 07:09

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