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Characterization of Supersmooth Surfaces with Roughness below 0.1 mm.
Schmitt, D.-R. (1990) Characterization of Supersmooth Surfaces with Roughness below 0.1 mm. Micro System Technologies (1990), .
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| Document Type: | Article | ||||
|---|---|---|---|---|---|
| Additional Information: | LIDO-Berichtsjahr=1990, pages=1, | ||||
| Title: | Characterization of Supersmooth Surfaces with Roughness below 0.1 mm. | ||||
| Authors: |
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| Date: | 1990 | ||||
| Journal or Publication Title: | Micro System Technologies (1990) | ||||
| Refereed publication: | Yes | ||||
| In ISI Web of Science: | Yes | ||||
| Page Range: | |||||
| Status: | Published | ||||
| HGF - Research field: | UNSPECIFIED | ||||
| HGF - Program: | no assignment | ||||
| HGF - Program Themes: | no assignment | ||||
| DLR - Research area: | UNSPECIFIED | ||||
| DLR - Program: | no assignment | ||||
| DLR - Research theme (Project): | ["eprint_fieldopt_dlr_project_search_L000" not defined] | ||||
| Location: | Braunschweig | ||||
| Institutes and Institutions: | Institute of Flight Control | ||||
| Deposited By: | elib DLR-Beauftragter | ||||
| Deposited On: | 02 Apr 2006 | ||||
| Last Modified: | 27 Apr 2009 07:09 |
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