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Characterization of Supersmooth Surfaces with Roughnesses Below 0.1 mm.

Schmitt, D.-R. (1990) Characterization of Supersmooth Surfaces with Roughnesses Below 0.1 mm. In: Proceedings SPIE 1319(1990), pp. 572-573. International Conference on Optics in Complex Systems, 5-10 August 1990, Garmisch-Partenkirchen..

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Abstract

Supersmooth surfaces with a roughness of 0.05 nm have been developed and characterized by Nomarski microscopy and other optical and mechanical profiling systems. Photomicrographs of these surfaces are being discussed.

Document Type:Conference or Workshop Item (Paper)
Additional Information: LIDO-Berichtsjahr=1990, pages=2,
Title:Characterization of Supersmooth Surfaces with Roughnesses Below 0.1 mm.
Authors:
AuthorsInstitution or Email of Authors
Schmitt, D.-R.UNSPECIFIED
Date:1990
Journal or Publication Title:Proceedings SPIE 1319(1990)
Page Range:pp. 572-573
Status:Published
Keywords:Surface, Roughness
Event Title:International Conference on Optics in Complex Systems, 5-10 August 1990, Garmisch-Partenkirchen.
HGF - Research field:UNSPECIFIED
HGF - Program:other
HGF - Program Themes:other
DLR - Research area:UNSPECIFIED
DLR - Program:no assignment
DLR - Research theme (Project):L -- no assignement
Location: Braunschweig
Institutes and Institutions:Institute of Flight Control
Deposited By: elib DLR-Beauftragter
Deposited On:02 Apr 2006
Last Modified:27 Apr 2009 07:08

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