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Laser-based fabrication of micro system components.
Staud, J. and Menschig, A. and Raiber, A. and Abeln, T. (1996) Laser-based fabrication of micro system components. In: Proc. Micro System Technologies '96 (1996) 772-774. VDE-Verlag GmbH, Berlin und Offenbach. 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, 17-19 September 1996.
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| Document Type: | Conference or Workshop Item (Paper) | ||||||||||
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| Additional Information: | institution=H. Reichl, A. Heuberger (Ed.), LIDO-Berichtsjahr=1996, | ||||||||||
| Title: | Laser-based fabrication of micro system components. | ||||||||||
| Authors: |
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| Date: | 1996 | ||||||||||
| Journal or Publication Title: | Proc. Micro System Technologies '96 (1996) 772-774 | ||||||||||
| Publisher: | VDE-Verlag GmbH, Berlin und Offenbach | ||||||||||
| Status: | Published | ||||||||||
| Keywords: | Laser tools, micro components | ||||||||||
| Event Title: | 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, 17-19 September 1996 | ||||||||||
| HGF - Research field: | UNSPECIFIED | ||||||||||
| HGF - Program: | Aeronautics | ||||||||||
| HGF - Program Themes: | L - no assignement | ||||||||||
| DLR - Research area: | UNSPECIFIED | ||||||||||
| DLR - Program: | L - no assignement | ||||||||||
| DLR - Research theme (Project): | L - Laser Research and Technology | ||||||||||
| Location: | Stuttgart | ||||||||||
| Institutes and Institutions: | Institute of Technical Physics | ||||||||||
| Deposited By: | elib DLR-Beauftragter | ||||||||||
| Deposited On: | 02 Apr 2006 | ||||||||||
| Last Modified: | 27 Apr 2009 05:52 |
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