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Laser-based fabrication of micro system components.

Staud, J. and Menschig, A. and Raiber, A. and Abeln, T. (1996) Laser-based fabrication of micro system components. In: Proc. Micro System Technologies '96 (1996) 772-774. VDE-Verlag GmbH, Berlin und Offenbach. 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, 17-19 September 1996.

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Document Type:Conference or Workshop Item (Paper)
Additional Information: institution=H. Reichl, A. Heuberger (Ed.), LIDO-Berichtsjahr=1996,
Title:Laser-based fabrication of micro system components.
Authors:
AuthorsInstitution or Email of Authors
Staud, J.UNSPECIFIED
Menschig, A.UNSPECIFIED
Raiber, A.Inst.f.Strahlwerkzeuge, Universität Stuttgart
Abeln, T.Inst.f.Strahlwerkzeuge, Universität Stuttgart
Date:1996
Journal or Publication Title:Proc. Micro System Technologies '96 (1996) 772-774
Publisher:VDE-Verlag GmbH, Berlin und Offenbach
Status:Published
Keywords:Laser tools, micro components
Event Title:5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, 17-19 September 1996
HGF - Research field:UNSPECIFIED
HGF - Program:Aeronautics
HGF - Program Themes:other
DLR - Research area:UNSPECIFIED
DLR - Program:L - no assignement
DLR - Research theme (Project):L - Laser Research and Technology
Location: Stuttgart
Institutes and Institutions:Institute of Technical Physics
Deposited By: elib DLR-Beauftragter
Deposited On:02 Apr 2006
Last Modified:27 Apr 2009 05:52

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